Abstract:Fabricating resonant cavities with conventional methods to improve the coupling efficiency of a detector in the terahertz (THz) region is difficult for the wavelength is too long. Here, we propose a solution by using the substrate cavity effect given that the substrate wavelength and thickness of the preparation device are in the same order. The planar dipole antenna-coupled Nb5N6 microbolometers with different substrate thicknesses were fabricated. The interference effect of the substrate cavity on the optical voltage response of the detector is analyzed experimentally and theoretically. The experimental results show that the optical response of the detector is determined by the length of the substrate cavity. Thus, the THz devices with different detection frequencies can be designed by changing the substrate cavity length. Furthermore, on the basis of this substrate cavity effect, an asymmetric coupled Fabry-Pérot (FP) cavity is constituted by simply placing a movable metallic planar mirror at the backside of the Si substrate. The incident THz radiation on the Nb5N6 microbolometer can be effectively manipulated by changing the substrate-mirror distance to modulate the phase relation between the reflect wave and the incident wave. The distinct radiation control can be observed, and the experiments can be well explained by numerically analyzing the responsivity dynamics that highlights the role of the FP cavity effect during radiation. All of the results discussed here can be extended to a broad range of frequency and other type of THz detectors.

Influence of Periodic Structure and Pixel Area on the Performance of Antenna‐coupled Nb5N6 Array Detector

Reflective Grating-Coupled Structure Improves the Detection Efficiency of THz Array Detectors

1 × 64 Nb5N6 Microbolometer Array Detector for Real Time THz Imaging

The Design of a Bowtie Antenna for 0.65 THz Detection

Performance Improvements of a Terahertz Direct Detector for Imaging Arrays

The Design of Nb5N6 micro-bolometer for 0.3 THz Detector

Characterizations of Diffractive Microlens in Nb5N6microbolometers Array for THz Detection

Planar Double-Slot Antenna Integrated into a Nb5N6 Microbolometer THz Detector.

High-Sensitivity RF Choke-Enhanced Dipole Antenna-Coupled Nb5N6 THz Detector

A Hybrid Antenna Coupled Nb&lt;sub&gt;5&lt;/sub&gt;N&lt;sub&gt;6&lt;/sub&gt; Microbolometer for Dual Polarization THz Detection

Quasioptical Terahertz Detector Based on the Series Connection of Nb5n6 Microbolometers

Flip-chip Interconnection Between Nb5N6 Terahertz Array Detectors and Readout Circuits

Investigation of antenna-coupled Nb5N6 microbolometer THz detector with substrate resonant cavity

Nb5n6 Microbolometer Array for A Compact Thz Imaging System

Effective Receiving Area of the Antenna-Coupled Terahertz Detector

Nb5n6 Microbolometer Terahertz Array Detection Chips

Antenna-coupled Uncooled Nb5N6microbolometers for Terahertz Imaging

Diffractive microlens integrated into Nb 5 N 6 microbolometers for THz detection

The Effect of Metal Reflector on Responsivity of Nb5N6 THz Detector

A Low Noise Readout Integrated Circuit for Nb5n6 Microbolometer Array Detector

High Performance of Room-Temperature NbSe2 Terahertz Photoelectric Detector.