Cu BEOL Compatible Selector with High Selectivity (>107), Extremely Low Off-Current (∼pa) and High Endurance (>1010)

Qing Luo,Xiaoxin Xu,Hongtao Liu,Hangbing Lv,Tiancheng Gong,Shibing Long,Qi Liu,Haitao Sun,Writam Banerjee,Ling Li,Nianduan Lu,Ming Liu
DOI: https://doi.org/10.1109/iedm.2015.7409669
2015-01-01
Abstract:Selector with high nonlinearity and low leakage current is critical to solve the sneaking current issue in crossbar memory array. In this work, we present a high performance Cu BEOL compatible threshold switching (TS) selector with several outstanding features, such as high nonlinearity (~10 7 ), ultra-low off-state leakage current (~pA), robust endurance (> 10 10 ), and sufficient on-state current density (~1 MA/cm 2 ). The observed threshold switching is resulted from the spontaneously rupture of conductive filament in doped HfO 2 material. By introducing a tunneling layer in series with the TS layer, the leakage current of the selector is dramatically reduced by more than 5 orders of magnitude. The array level benchmark of this TS selector qualifies its promising potential for 3D storage application.
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