Self-compliance Cu-doped HfO2-based Selector with Low Leakage and High Reliability

Qing Luo,Xiaoxin Xu,Tiancheng Gong,Hangbing Lv,Shibing Long,Qi Liu,Ming Liu
DOI: https://doi.org/10.1109/snw.2016.7578001
2016-01-01
Abstract:An ideal selector device should have ultra-low leakage current, high reliability and fast recovery speed. In this work, we present a Cu BEOL compatible threshold switching (TS) selector being capable of maintaining ultra-low leakage for hours and recovering low leakage after write operation rapidly. High reliability and uniformity are achieved in both read operation and write operation.
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