Cu Beol Compatible Selector With High Selectivity (> 10(7)), Extremely Low Off-Current (Similar To Pa) And High Endurance (> 10(10))

Qing Luo,Xiaoxin Xu,Hongtao Liu,Hangbing Lv,Tiancheng Gong,Shibing Long,Qi Liu,Haitao Sun,Writam Banerjee,Ling Li,Nianduan Lu,Ming Liu
2015-01-01
Abstract:Selector with high nonlinearity and low leakage current is critical to solve the sneaking current issue in crossbar memory array. In this work, we present a high performance Cu BEOL compatible threshold switching (TS) selector with several outstanding features, such as high nonlinearity (similar to 10(7)), ultra-low off-state leakage current (similar to pA), robust endurance (>10(10)), and sufficient on-state current density (similar to 1 MA/cm(2)). The observed threshold switching is resulted from the spontaneously rupture of conductive filament in doped HfO2 material. By introducing a tunneling layer in series with the TS layer, the leakage current of the selector is dramatically reduced by more than 5 orders of magnitude. The array level benchmark of this TS selector qualifies its promising potential for 3D storage application.
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