Enhanced Performance of Ag-filament Threshold Switching Selector by Rapid Thermal Processing

Qilin Hua,Huaqiang Wu,Bin Gao,He Qian
DOI: https://doi.org/10.1109/vlsi-tsa.2018.8403855
2018-01-01
Abstract:Selector devices are typically employed to suppress sneak path currents in RRAM array. Here, we demonstrate a bidirectional Ag- filament threshold switching (TS) selector with an enhanced performance of large selectivity over 10 8 and high on-state current beyond 100 μA through rapid thermal processing (RTP). The TS selector has more than 100 M cycles endurance and can remain stable switching even when ambient temperature is up to 200°C. The mechanism of the TS selector is analyzed to explain the bidirectional selector characteristics. Indeed, this TS selector would be a good candidate for 1S1R configuration and future high-density 3D RRAM integration.
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