Abstract:Developing microscale sensors capable of force measurements down to the scale of piconewtons is of fundamental importance for a wide range of applications. To date, advanced instrumentations such as atomic force microscopes and other specifically developed micro/nano‐electromechanical systems face challenges such as high cost, complex detection systems and poor electromagnetic compatibility. Here, we present the unprecedented design and 3D printing of general fiber‐integrated force sensors using spring‐composed Fabry‐Perot cavities. We calibrate these microscale devices employing varied‐diameter μ m‐scale silica particles as standard weights. The force sensitivity and resolution reach values of (0.436 ± 0.007) nm/nN and (40.0 ± 0.7) pN, respectively, which are the best resolutions among all fiber‐based nanomechanical probes so far. We also measured the non‐linear airflow force distributions produced from a nozzle with an orifice of 2 μ m which matches well with the full‐sized simulations. With further customization of their geometries and materials, we anticipate the easy‐to‐use force probe can well extend to many other applications such as air/fluidic turbulences sensing, micro‐manipulations, and biological sensing. This article is protected by copyright. All rights reserved

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