Abstract:The atomic force microscope (AFM) can be used in dynamic tipping mode as an effective lithography technique capable of manufacturing nanometer sized devices on the surface of a silicon wafer with a higher resolution surface characterization. The most difficult challenge in fabrication of nanostructure based on AFM nano-oxidation approach is the way of controlling an electric field between a cantilever probe tip and a silicon wafer. A water bridge builds up between the tip and the wafer, resulting in the oxidation due to the high electric field in the region. A reconstructive AFM system for nano-oxidation with a tapping model, implemented in an air, was developed. The presented AFM implements the increasing of electric field intensity by analyzing the impact voltage from −1 V to −5 V, electric field, and ion concentrations at the ambient/oxide and oxide/silicon interfaces, while the growth of thin oxides assumes a single liquid/silicon interface, which is modeled as an infinitely long conducting plane. Therefore, particle distribution for the surface charge density is generated for topography simulations. Based on the control-parameters, an enhanced electrical field of up to 1010 V/m can be obtained, which provides a powerful support for controllable experimental study of nanostructures fabrication with AFM tip induced local anodic oxidation. This showed the dependence of applied voltage types and various nanostructures and life time of AFM tip, by controlling tip-sample position in nanolithography processes is an important factor for controlling the aspect electric field distribution. And the effect of different parameters on enhancement distribution was performed and analyzed in this paper.

Effect of the Electric-Field Distribution on the Morphology of Dot-Array Gratings Fabricated by AFM-based Nanolithography

Role of Electric Field Distribution in Local Anodic Oxidation

Experimental Study and Theoretical Analysis of the Nanometre-Scale Line Structure Fabrication by AFM Electric Lithography

3-D finite element calculation of electric field enhancement for nanostructures fabrication mechanism on silicon surface with AFM tip induced local anodic oxidation

Preparation of Micro/Nanostructures by AFM Field-induced Oxidation

Enhancement of Exchange Bias and Ferromagnetic Resonance Frequency by Using Multilayer Antidot Arrays

Study on Nanofabrication with Dynamic Electrical-Field-induced Anodic Oxidation

Fabrication of nanoscale to microscale 2.5D square patterns on metallic films by the coupling AFM lithography

Effect of the tip-sample contact force on the nanostructure size fabricated by local oxidation nanolithography.

Impact of Various Parameters on Nanostructures Fabrication Mechanism on Silicon Surface with AFM Tip Induced Local Anodic Oxidation

A Novel Atomic Force Microscope Operating in Liquid for in Situ Investigation of Electrochemical Preparation of Porous Alumina.

Field Emission from Dense, Sparse, and Patterned Arrays of Carbon Nanofibers

Nano-fabrication System Based on Atomic Force Microscopy

Field-Emission Properties of Nanostructured Wo3 Arrays Fabricated Using Tungsten Hot-Filament Chemical Vapor Deposition

Exchange Bias Study of Sub-100 Nm-Diameter CoFeB/IrMn Antidot and Nanodot Arrays Fabricated by Nanosphere Lithography

Ag Dots Array Fabricated Using Laser Interference Technique for Biosensing

Research on AFM tip-related nanofabrication of two-dimensional materials

Field electron emission from ultra-high density Si nanotip arrays

Nanolithography by non-contact AFM induced local oxidation : Fabrication of tunneling barriers suitable for single electron devices

Experimental Research on Nanostructure Fabricated by AFM Probe Combining with a CW Laser

Nanopit Generation on HOPG Surface Induced by CAFM Electric Lithography