Field-Emission Properties of Nanostructured Wo3 Arrays Fabricated Using Tungsten Hot-Filament Chemical Vapor Deposition

Di Lu,Akihisa Ogino,Bo Liang,Jiabin Liu,Masaaki Nagatsu
DOI: https://doi.org/10.1143/jjap.48.090206
IF: 1.5
2009-01-01
Japanese Journal of Applied Physics
Abstract:Nanostructured WO3 arrays fabricated by tungsten hot-filament chemical vapor deposition in an oxygen/argon gas mixture were studied in order to develop field-emission materials. Nanostructured WO3 arrays of different shapes were grown by controlling the substrate temperature and the distance from the hot filament. We observed that their field-emission properties strongly depended on their tip structure. Numerical calculations of field enhancement factors for different tip geometries were carried out to explain the experimental results. The numerical result reveals that the planar tip structure may help nanostructured WO3 arrays exhibit better field-emission properties.
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