Fabrication And Field Emission Study Of Atomically Sharp High-Density Tungsten Nanotip Arrays

ke sun,jae young lee,biyun li,wei liu,congqin miao,yahong xie,xinyu wei,thomas p russell
DOI: https://doi.org/10.1063/1.3437079
IF: 2.877
2010-01-01
Journal of Applied Physics
Abstract:Atomically sharp high-density tungsten nanotip arrays are fabricated by nanocasting using a patterned SiO2 template. The fabrication involves mainly top-down processes making it fully compatible with today's Si technology. The obtained tungsten nanotip arrays show atomically sharp tips (radius of curvature smaller than 1 nm), high emitter density (similar to 5 x 10(10) cm(-2)), perfect tip alignment, and excellent field emission properties with a turn-on field of 2.1 V/mu m and a field enhancement factor of 3334. The unique fabrication process flow leads to the highly uniform height of the W nanotips, allowing for submicron cathode-anode spacing, which very much relaxes the requirement of vacuum level and makes it possible for low vacuum operation. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3437079]
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