Insight Into Pbti In Ingaas Nanowire Fets With Al2o3 And Laalo3 Gate Dielectrics

Y. Li,S. Y. Di,H. Jiang,P. Huang,Y. J. Wang,Z. Y. Lun,L. Shen,L. X. Yin,X. Zhang,G. Du,X. Y. Liu
DOI: https://doi.org/10.1109/IEDM.2016.7838555
2016-01-01
Abstract:The traps induced degradation of the Al2O3 and LaAlO3 based InGaAs nanowire FETs are investigated by 3D Kinetic Monte-Carlo (KMC) method considering trap coupling and trap generation. The measurement time constants of the defect in Al2O3 and positive bias temperature instability (PBTI) can be well interpreted by consideration with metastable state. The power law of threshold shift can be greatly affected by the stress. Different from traps in Al2O3, oxygen vacancies and interstitial Aluminum ions in LaAlO3 have important roles in PBTI. Simulated results indicate that Al2O3 have better PBTI and recovery than that of LaAlO3.
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