PBTI evaluation of In 0.65 Ga 0.35 As/In 0.53 Ga 0.47 As nanowire FETs with Al 2 O 3 and LaAlO 3 gate dielectrics

Ying Li,Kunliang Wang,Shaoyan Di,P. Huang,Gang Du,X. Y. Liu
DOI: https://doi.org/10.1109/irps.2018.8353702
2018-01-01
Abstract:This paper investigates the positive bias temperature instability (PBTI) characteristics of InGaAs nanowire FETs with different channel material components and gate dielectrics by 3D-Kenetic Monte Carlo (KMC) method. It is found that PBTI becomes worse as the increase of In component due to different band line-up. Moreover, PBTI along nanowire thickness (T nw ) and width (W nw ) directions shows differences due to non-uniform oxide electric field. With a sandwich channel structure, comprising different InGaAs compositions, the difference between the ΔV th of T nw and W nw (ΔV th1-2 ) enlarges at high temperature. The nanowire with LaAlO 3 dielectric shows lager PBTI effects and smaller difference between T nw and W nw than Al 2 O 3 dielectric.
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