Correlation of I<inf>d</inf>- and I<inf>g</inf>-random Telegraph Noise to Positive Bias Temperature Instability in Scaled High-&Amp;#x03ba;/metal Gate N-Type MOSFETs

Chia‐Yu Chen,Qihua Ran,Hyun‐Jin Cho,A. Kerber,Yang Liu,Ming-Ren Lin,R.W. Dutton
DOI: https://doi.org/10.1109/irps.2011.5784475
2011-01-01
Abstract:Random telegraph noise (RTN) in high-κ nMOSFETs is directly linked to Positive Bias Temperature Instability (PBTI). For the first time, the correlation between I d - and I g -RTN is clearly observed in high-κ MOSFET. I g -RTN is directly related to physical trapping or de-trapping and the I d -RTN reflects sensitivity to charge trapping as determined by gm, which is confirmed by both experiments and TCAD simulations.
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