Negative Bias Temperature Instability Characteristics and Degradation Mechanisms of Pmosfet with High-K/Metal Gate Stacks

Shangqing Ren,Hong Yang,Wenwu Wang,Hao Xu,Weichun Luo,Bo Tang,Zhaoyun Tang,Jing Xu,Jiang Yan,Chao Zhao,Tianchun Ye
DOI: https://doi.org/10.1149/05201.0953ecst
2013-01-01
ECS Transactions
Abstract:In this work, NBTI characteristics of pMOSFET with high-k/metal gate stacks are systematic investigated and the degradation mechanisms are analyzed. The threshold voltage shift with stress time obeys power-law, but the power exponent is dependent on stress voltage, and it ranges from 0.26 to 0.16. The activation energy (E-a) under -1.4V stress is extracted as 0.24eV. Trap charging in the high-k layer dominates the NBTI degradation rather than interface state generation. The lifetime prediction prefers to power law model.
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