Experimental Investigation of Border Trap Generation in InGaAs nMOSFETs With $\hbox{Al}_{2}\hbox{O}_{3}$ Gate Dielectric Under PBTI Stress

Guangfan Jiao,Chengjun Yao,Yi Xuan,Daming Huang,Peide D. Ye,Ming-Fu Li
DOI: https://doi.org/10.1109/TED.2012.2190417
IF: 3.1
2012-01-01
IEEE Transactions on Electron Devices
Abstract:The reliability performance of InxGa1-xAs n-type metal-oxide-semiconductor field-effect transistors with Al2O3 gate dielectric under positive-bias temperature instability stress is investigated systematically. A model of stress-induced border traps was proposed to interpret all charge pumping and I-V experimental results excellently. The stress-induced border traps include recoverable donor traps ...
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