Abstract:This paper presents a digital MEMS gyroscope with 40[Formula: see text]/h instability variation in −40[Formula: see text]C to 85[Formula: see text]C, performing 5[Formula: see text]/h instability variation at normal temperature and 0.01% nonlinearity in the range of ±400[Formula: see text]/s. This stability was achieved by using temperature compensation for the zero-output value changed after the temperature signal. As the resonant frequency of the mechanical structure varied according to the temperature linearly, a frequency calculator was adopted to detect the temperature of the mechanical structure. And the resolution of the frequency could be up to 0.01 Hz with a 1 MHz clock frequency used, obtaining a 10 Hz bandwidth. The driving mode used a PI controller to control a VGA to maintain at a fixed effective value of the driving signal. The sensing mode contained a low noise C/V convertor and a switch demodulation, which could give the angular velocity signal to the A/D convertor. Then the output data of A/D will be compensated in the digital domain. Finally, the digital output of the gyroscope will be available through a normal SPI serial port. The whole circuit was realized on one chip with an active circuit area of 3.5 mm × 5.2 mm fabricated in a 0.35 [Formula: see text]m CMOS technology. And the MEMS structure and circuit are packaged in a 2.5 cm × 2.5 cm × 2.5 cm aluminum mold. The digital output of the gyroscope earned a noise floor of 0.0024[Formula: see text]/s.

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