Temperature drift suppression for micro‐electro‐mechanical system gyroscope based on vibrational‐displacement control with harmonic amplitude ratio

Feng Bu,Rui Feng,Shuwen Guo,Ming Zhou,Yiwang Wang,Feng Wang
DOI: https://doi.org/10.1049/mna2.12187
2024-01-04
Micro & Nano Letters
Abstract:The drive‐mode vibrational‐displacement amplitude is affected by the signal pickup circuit and structural parameters, which significantly influence the temperature drifts of the bias and scale factor. This study proposes a vibrational‐displacement control method based on harmonic amplitude sideband‐ratio (SBR), namely SBR‐AGC, which characterizes the vibration displacement amplitude using the harmonic amplitude ratio of the vibrational electrical signal. Micro‐electro‐mechanical system gyroscope detection output is susceptible to drift due to ambient temperature variations. Furthermore, the drive‐mode vibration amplitude is affected by the signal pickup circuit and structural parameters, which significantly influence the temperature drift of the bias and scale factor (SF). This study proposes a vibration amplitude control method based on harmonic amplitude sideband‐ratio (SBR), namely SBR‐AGC, which characterizes the vibration amplitude using the harmonic amplitude ratio of the vibrational electrical signal. The constancy of vibration amplitude is maintained via closed‐loop control to suppress bias and SF temperature drift. The experimental results on cobweb‐like disk resonator gyroscope reveal that the temperature coefficient of bias in the SBR‐AGC mode lies within −20 to 60°C and decreases by 36%, and the temperature coefficient of the SF lies within −10 to 50°C and decreases by 49.7%. Therefore, the environmental adaptability of the gyroscope is effectively improved.
materials science, multidisciplinary,nanoscience & nanotechnology
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