NANOMETER-SCALE OXIDATION STRUCTURES PRODUCEDBY CONDUCTIVE ATOMIC FORCE MICROSCOPE

胡晓东,胡小唐,陈津平
DOI: https://doi.org/10.3969/j.issn.0493-2137.2001.02.005
2001-01-01
Abstract:The nanofabrication on silicon and other semiconductor and metalsurfaces by the process of localized field-induced anodization is one promising method for nanometer device using conductive atomic force microscope.The absorbed water from the atmosphere as the electrolyte is necessary in field-induced anodization,and the relationship between the humidity and the factors of nanometer-scale structure is processed.Nanometer-scale wires and pattems have been produced on termination Si∶H surface,and the minimum linewidth is 22 nm.
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