Fabrication and Application of Nano-Porous Aluminum

黄瑞青,党建印,黄靖云

DOI: https://doi.org/10.3969/j.issn.1671-4776.2002.05.005

2002-01-01

Abstract:The fabrication technique of nano-porous aluminum by anodic oxidation is introduced in this paper. The porous size of anodic aluminum can be controlled in nanometer, so anodic ox-idation porous aluminum can be wildly used for the fabrication of semiconductor nano-materials.

What problem does this paper attempt to address?

Fabrication of Nanostructure by Porous Anodic Alumina

任刚,陈皓明

DOI: https://doi.org/10.3321/j.issn:1005-023x.2002.10.015

2002-01-01

Abstract:Although anodic aluminum oxidation has been widely used,the value of porous anodic alumina (PAA )for nanostructure fabrication has been recognized and attracted much attention only in recent years.The oxidation mechanism,fabrication method and recent research progress are reviewed.
Fabrication and application of nanoporous anodic aluminum oxide: a review

Sixiang Liu,Junlong Tian,Wang Zhang

DOI: https://doi.org/10.1088/1361-6528/abe25f

IF: 3.5

2021-03-10

Nanotechnology

Abstract:Abstract Due to the unique optical and electrochemical properties, large surface area, tunable properties, and high thermal stability, nanoporous anodic aluminum oxide (AAO) has become one of the most popular materials with a large potential to develop emerging applications in numerous areas, including biosensors, desalination, high-risk pollutants detection, capacitors, solar cell devices, photonic crystals, template-assisted fabrication of nanostructures, and so on. This review covers the mechanism of AAO formation, manufacturing technology, the relationship between the properties of AAO and fabrication conditions, and applications of AAO. Properties of AAO, like pore diameter, interpore distance, wall thickness, and anodized aluminum layer thickness, can be fully controlled by fabrication conditions, including electrolyte, applied voltage, anodizing and widening time. Generally speaking, the pore diameter of AAO will affect its specific application to a large extent. Moreover, manufacturing technology like one/two/multi step anodization, nanoimprint lithography anodization, and pulse/cyclic anodization also have a major impact on overall array arrangement. The review aims to provide a perspective overview of the relationship between applications and their corresponding AAO pore sizes, systematically. And the review also focuses on the strategies by which the structures and functions of AAO can be utilized.

materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology
A Controllable and Widely Applicable Electrochemical Anodization Process to Fabricate Porous Anodic Aluminum Oxide Membrane

Yuanjing Lin,Qingfeng Lin,Xue Liu,Yuan Gao,Zhiyong Fan

DOI: https://doi.org/10.1149/ma2015-02/31/1181

2015-01-01

ECS Meeting Abstracts

Abstract:Inspired by the versatile applications of porous alumina nanostructures on solar cells, supercapacitors, biosensors, and so forth, research on fabrication of anodized aluminum oxide (AAO) with nanopore structure has achieved substantial advancements. Porous AAO membrane with nanostructures has become one of the most popular template materials for synthesis of a broad range of functional nanostructures such as nanowires, nanopillars, nanotubes, etc. While fabrication of highly ordered nanoporous AAO with tunable geometric features has been widely reported, its growth rate can be easily affected by the fluctuation of parameters such as acid concentration and temperature during the electrochemical anodization process. In order to meet the demand of fabricating AAO with various surface parameters and precise target pore depth control for scientific research and commercial applications, a controllable fabrication process is essential. Here, we developed a method which can implement precise pore depth control of AAO layer during the electrochemical anodization process, via monitoring the integrated charge. This method is applicable in a large voltage range and can be widely applied in fabrication of nanostructure with material such as TiO2and so on.
Fabrication of in Situ Ultrathin Anodic Aluminum Oxide Layers for Nanostructuring on Silicon Substrate

Bo Yan,Hoa T. M. Pham,Yue Ma,Yan Zhuang,Pasqualina M. Sarro

DOI: https://doi.org/10.1063/1.2767768

IF: 4

2007-01-01

Applied Physics Letters

Abstract:The authors demonstrate a method for the fabrication of in situ ultrathin porous anodic aluminum oxide layers (aspect ratio<2:1) on Si, which can be directly used as templates for nanodot preparation and for pattern transfer. The regular shape of the aluminum oxide pores is maintained even when the thickness of the aluminum oxide template is reduced to 50nm. By using these in situ ultrathin templates as lift-off masks, the authors successfully prepared a BaxSr1−xTiO3 nanodot array on Si surface. Furthermore, these nanotemplates are employed as lithographic masks to transfer the nanopattern into the silicon substrate.
A highly controlled fabrication of porous anodic aluminium oxide surface with versatile features by spatial thermo-anodization

Zhehui Zhang,Sreepathy Sridhar,Guoying Wei,Yundan Yu,Zhongquan Zhang,Li Jiang,Yumeng Yang,Muhammad Wakil Shahzad,Xue Chen,Ben Bin Xu

DOI: https://doi.org/10.1016/j.surfcoat.2020.126809

IF: 4.865

2021-02-01

Surface and Coatings Technology

Abstract:Thermo-anodization technology has been considered as an effective means to improve the thermal, physical and chemical properties for metal alloy. In this work, we achieve a porous black layer on the surface of aluminium alloy through an environmentally friendly anodic oxidation process, with a high thermal emittance (0.96) and a high solar absorptivity (0.921). In addition, the black thermo-anodized coating layer shows a unique anti-corrosion property under UV irradiation. A hybrid hydrophobic surface has been facilitated through treating the thermo-anodized porous layer with silane. Moreover, an anti-icing feature can be realised that can effectively delay the freezing of water droplet on the surface of AA2024 aluminium alloy. As such, the specific anodic process of coating provides a simple method for improving the solar absorptivity and infrared emittance of aluminium alloys, enabling broad applications in aerospace engineering.

physics, applied,materials science, coatings & films
Electrochemical Fabrication Of Novel Nanostructures Based On Anodic Alumina

Xs Peng,Ac Chen

DOI: https://doi.org/10.1088/0957-4484/15/7/005

IF: 3.5

2004-01-01

Nanotechnology

Abstract:A novel nanostructured sandwich PAA/Al/PAA (PAA: porous anodic alumina) was successfully designed and fabricated by anodic oxidation on both sides of an At foil. The pore size of the PAA membranes was controlled by choosing appropriate voltage, length of anodic oxidization time, temperature and electrolytes. The thickness of the central At layer was varied by changing the anodic oxidization time. We show that the nanostructured sandwich PAA/Al/PAA can be used as a template in fabricating homogeneous or heterogeneous nanostructured sandwiches by depositing the same kind of material or different materials into the PAA membranes of the sandwich. We also show that it can be used to prepare nanowires and bipolar electrodes. In addition, Al nanosheets or Al nanowalls were produced by removing the PAA films completely or partially. Nanogaps between the PAA films were also formed by etching away the centre At layer of the sandwich structures. The thickness of these nanosheets, nanowalls and nanogaps was controlled by choosing appropriate electrolytes and electrochemical parameters during the anodic oxidation of At. All these nanostructures offer novel opportunities for both fundamental research and technological applications of low dimensional nanostructure systems.
Synthesis and characterization of porous anodic aluminum oxide with precise controllable pore diameter

Xue Zheng,Zhimou Xu

DOI: https://doi.org/10.1117/12.2626542

2022-01-21

Abstract:The preparation of low-cost and large-area nanostructures is one of the frontier hotspots and difficulties in the field of nanotechnology. We propose a method for the preparation of nanostructures by using plasma to etch anodic aluminum oxide (AAO) membrane. The transmission characteristics of plasma particles in AAO nanopores are explored. And the precise control of the porous AAO structure is achieved. The nanostructure is successfully transferred to the LED chip, and the luminous efficiency is improved. These studies will provide a good theoretical and technical basis for the precise transfer of nanostructures and the low-cost preparation of large-area nanostructured devices.
A Highly Controllable Electrochemical Anodization Process to Fabricate Porous Anodic Aluminum Oxide Membranes

Yuanjing Lin,Qingfeng Lin,Xue Liu,Yuan Gao,Jin He,Wenli Wang,Zhiyong Fan

DOI: https://doi.org/10.1186/s11671-015-1202-y

Nanoscale Res Lett

Abstract:Due to the broad applications of porous alumina nanostructures, research on fabrication of anodized aluminum oxide (AAO) with nanoporous structure has triggered enormous attention. While fabrication of highly ordered nanoporous AAO with tunable geometric features has been widely reported, it is known that its growth rate can be easily affected by the fluctuation of process conditions such as acid concentration and temperature during electrochemical anodization process. To fabricate AAO with various geometric parameters, particularly, to realize precise control over pore depth for scientific research and commercial applications, a controllable fabrication process is essential. In this work, we revealed a linear correlation between the integrated electric charge flow throughout the circuit in the stable anodization process and the growth thickness of AAO membranes. With this understanding, we developed a facile approach to precisely control the growth process of the membranes. It was found that this approach is applicable in a large voltage range, and it may be extended to anodization of other metal materials such as Ti as well.
Fabricating Anodic Aluminum Oxide by Anodic-Oxidation

Ji Yan He,Jian Dan Ren,Yan Bin He

DOI: https://doi.org/10.4028/www.scientific.net/amr.383-390.5522

2011-11-01

Advanced Materials Research

Abstract:Uniform parallel pores and controllable pore diameter make Anodic Aluminum Oxide (AAO) membrane one of the best materials in synthesis of one-dimensional nano-structured material. High orderly AAO template was prepared by anodic-oxidation. The prepared AAO membrane’s apertures ranged from 30 nm to 75 nm. Within a few microns, holes were orderly arranged. The fabricating methods of AAO template in different electrolyte were studied and the factors which affect the pore distribution, such as electrolyte types, voltage and concentration were discussed.
Anti-Corrosion Property of Atomic Layer Deposition Films for Anodized Aluminum

Yi Jia,Mang Yang,Wei Er Lu,Feng Ji,Chao Bo Li,You Tong Fang,Yang Xia

DOI: https://doi.org/10.4028/www.scientific.net/msf.809-810.689

2014-01-01

Materials Science Forum

Abstract:Single and multilayer of Al2O3 and TiO2 were fabricated on anodized aluminum by atomic layer deposition. The effect of processing parameters on pore sealing and anti-corrosion property was studied. It is concluded that the micropores on anodized aluminum could be sealed by atomic layer deposition oxide films through SEM and staining experiments. The anti-corrosive property is affected mainly by the film thickness and process temperature. The acidic drip and salt spray test shows that the anti-corrosion property is enhanced as the film thickness increase. With the similar thickness, Al2O3/TiO2 multilayer film has the best anti-corrosion property, while the single Al2O3 layer appears the poorest. The complementary roles between two basic materials result in the enhanced application property.
Ordering and Modification of Nanopores in Porous Anodic Aluminum Membranes

Zhaoqian Liu,Gaoshan Huang,Menglin Li,Jinxing Li,Yifang Chen,Yongfeng Mei,Ran Liu

DOI: https://doi.org/10.1016/j.mee.2012.04.001

IF: 2.3

2012-01-01

Microelectronic Engineering

Abstract:Anodic aluminum oxide (AAO) has attracted significant intension for decades owing to its extensive applications in nanoscale science and technology. Novel structures, like nanoparticles, nanotubes, nanowires, etc., have been developed based on AAO templates and widely applied in optics, micro/nano electronics and microfluidic systems, etc. In this work, three approaches have been developed to control and modify the parameters and arrangement of nanopores in anodized alumina, including the change of electrochemical conditions, guiding the growth of nanopores by highly aligned line structure, and further modification of nanopores by physical vapor deposition. Moreover, highly oriented line structures used to guide the channel growth have been fabricated under optimal conditions and could be utilized as templates to form wrinkled membranes, nanowires, etc. We conclude that electrochemical anodization should be a very promising technique for the fabrication of various nanoscale structures leading to potential applications in optics, solar systems and micro/nano electronics.
Fabrication of Anodic Aluminum Oxide Template and Cu Nanowire Surface Fastener

Hiromasa Teshima,Kohei Kojima,Yang Ju

DOI: https://doi.org/10.1115/1.4028316

2014-01-01

Journal of Electronic Packaging

Abstract:There is an urgent need in surface mount technology (SMT) for a nontoxic, reusable and low temperature bonding technique which can afford good mechanical support as well as electrical contact. Meanwhile in the nanotechnology, many excellent and unique structure-related properties such as the high mechanical strength, the high conductivity and the adhesion ability of gecko feet have been studied. Our lab proposes a new patterned structure of Au nanowire array named nanowire surface fastener (NSF), which cold bonding for surface mount technology can be realized at room temperature. Then various methods have been developed to fabricate nanowire, such as arc discharge, catalytic CVD growth and template synthesis, and so on. Among these methods, the template method has been widely used for preparing one-dimensional nanostructures such as metals, semiconductors, polymers, and other materials by electrochemical, electroless deposition or sol-gel technique. Especially anodic aluminum oxide template assisted way has attached considerable attention due to its unique structure properties, such as controllable pore diameter, extremely narrow pore size distribution with high densities, high aspect ratios, and ideally cylindrical pore shape. The well arranged porous anodic aluminum oxide membrane is fabricated from aluminum film by two steps zM oxalic acid electrolytes. The anodic aluminum oxide membrane was investigated for features such as pore size, interpore distance, and thickness by 40 V. It is important for fabrication of porous anodic aluminum oxide template to find out elimination of the barrier layer of oxide and the pore extending rate by 0.5 M phosphoric acid. Morphologies of surface of aluminum film between anodization process and the anodic aluminum oxide barrier layer was researched by using atomic force microscope and scanning electron microscope. Results showed that the anodic aluminum oxide having the same diameter of the pore and the well arranged pore array without branching channel was obtained. The diameter of the pore before the pore extending treatment is 42 nm and the diameter of the pore after the pore extending treatment for 30 minutes is 86 nm. It was found that the diameter of the pore increased per 15 nm by the pore extending treatment for 10 minutes. We fabricated the through-hole anodic aluminum oxide template and made Cu nanowire by the template of our own making. By using Cu nanowire, we try to produce nanowire surface fastener and evaluate its properties.
Fabrication of micro/nanoporous templates with a novel hierarchical structure by anodization of a patterned aluminum surface

Le Shen,Yi Li,Wenjin Zhong,Jingcheng Wu,Jianhua Cheng,Ling Jin,Xing Hu,Zhiyuan Ling

DOI: https://doi.org/10.1016/j.elecom.2021.107014

IF: 5.443

2021-05-01

Electrochemistry Communications

Abstract:Hierarchical functional materials with various micro/nanostructures have attracted widespread attention because of their particular physical and chemical characteristics. Finding appropriate methods for the preparation of hierarchical functional materials has thus become a hot topic for research. In the present work, micro/nanoporous templates with a novel hierarchical structure have been fabricated by anodization of a patterned aluminum surface. Firstly, a layer of nail gel (CA600) is applied to the surface of an electropolished aluminum sheet by spin coating. After drying, interconnected microscale cracks are formed on the surface of the aluminum sheets, forming a patterned aluminum surface. Secondly, the aluminum sheets are anodized in 0.3 M oxalic acid electrolyte at 30−50 V (15 oC) to form micro/nanoporous templates with a novel hierarchical structure. The effect of spinning rate, spinning time, and anodization voltage on the microstructure of the porous templates has been studied in detail. The porous templates can be used to prepare various hierarchical functional materials.

electrochemistry
T0301-1-1 Fabrication of Au Nanowire Utilizing Porous Aluminum

Masahiro AMANO,Yuka IWASAKI,Yang JU

DOI: https://doi.org/10.1299/jsmemecjo.2010.8.0_167

2010-01-01

The proceedings of the JSME annual meeting

Abstract:This paper describes the fabrication of Au nanowire utilizing porous aluminum. To fabricate nanowires, at first Au film with the thickness of 100 nm was evaporated on one side of porous aluminum as a conductive working electrode. Nanowires were obtained via electrodeposition under a constant electrical potential about -3 V in 40g/l KAu(CN)_2, 100g/l KH_2PO_4 aqueous solution at room temperature. After etching in 3 M NaOH aqueous solution to remove porous aluminum, nanowires with the average diameter of 200 nm and length 8 approximately, were observed by scanning electron microscope. It was confirmed that the nanowires consisted of Au by energy dispersive X-ray analysis.
Utilizing Cell Culture Assisted Anodization to Fabricate Aluminium Oxide with a Gradient Microstep and Nanopore Structure

Zhiying Zhang,Yiyan Guo,Jiangbo Lu,Juan Li,Yingjun Ma,Ting Liu,Ruiqing Liang,Runguang Sun,Jun Dong

DOI: https://doi.org/10.1021/acsomega.2c03471

IF: 4.1

2022-10-18

ACS Omega

Abstract:Anodic aluminum oxide (AAO) with a gradient microstep and nanopore structure (GMNP) is fabricated by inversely using cell culture to control the reaction areas in the electrochemical anodization, which shows a larger porosity than that of typical planar AAO. The figure of the microstep is influenced by the cell dehydration temperature which controls the cell shrinkage degree. A GMNP AAO with a diameter of 2.5 cm is achieved. Polymer with a gradient microstep and nanonipple structure is...

chemistry, multidisciplinary
Porous and Ag-, Cu-, Zn-Doped Al2O3 Fabricated via Barrier Anodizing of Pure Al and Alloys

Alexander Poznyak,Gerhard Knörnschild,Alexander Hoha,Andrei Pligovka

DOI: https://doi.org/10.3390/coatings14050576

IF: 3.236

2024-05-07

Coatings

Abstract:The paper breaks the general concepts and shows that pore formation is possible in anodic aluminum barrier oxide by anodizing of pure Al, and also presents the results of electrochemical anodizing in boric acid and citrate buffer aqueous solutions of homogeneous binary alloys AlCu (4 wt.%), AlZn (3 wt.%) and AlAg (5.2 wt.% and 16.2 wt.%). Barrier anodizing allowed obtaining Al2O3 thin films doped with copper, zinc and silver. The anodizing behavior and the effect of anodic current density on the charge were studied, and scanning electron microscopy, X-ray photoelectron spectroscopy and Auger electron spectroscopy analyses were performed. The doped alumina thin films, which are a mixture of Al2O3, Cu2O, ZnO, Ag2O, AgO and promising double metal oxides CuAlO2, AgAlO2 and ZnAl2O4, are promising for use as resistive switching, photoelectron, mechanical, photo-thermoelectric and fluorescence materials; sensors; and transparent conductive and photocatalyst films.

materials science, multidisciplinary, coatings & films,physics, applied
Progress in Nano-Engineered Anodic Aluminum Oxide Membrane Development

Gerrard Eddy Jai Poinern,Nurshahidah Ali,Derek Fawcett

DOI: https://doi.org/10.3390/ma4030487

IF: 3.4

2011-02-25

Materials

Abstract:The anodization of aluminum is an electro-chemical process that changes the surface chemistry of the metal, via oxidation, to produce an anodic oxide layer. During this process a self organized, highly ordered array of cylindrical shaped pores can be produced with controllable pore diameters, periodicity and density distribution. This enables anodic aluminum oxide (AAO) membranes to be used as templates in a variety of nanotechnology applications without the need for expensive lithographical techniques. This review article is an overview of the current state of research on AAO membranes and the various applications of nanotechnology that use them in the manufacture of nano-materials and devices or incorporate them into specific applications such as biological/chemical sensors, nano-electronic devices, filter membranes and medical scaffolds for tissue engineering.

materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,metallurgy & metallurgical engineering
Facile fabrication of a robust and corrosion resistant superhydrophobic aluminum alloy surface by a novel method

Cansen Liu,Fenghua Su,Jizhao Liang

DOI: https://doi.org/10.1039/c4ra09390a

2014-01-01

RSC Adv.

Abstract:A robust superhydrophobic surface with excellent mechanical abrasion and corrosion resistance, self-cleaning ability as well as long-term stability is fabricated by a novel anodic oxidation and self-assembly process.
Fabrication and characterization of anodic films onto the FeCrAl stainless steel in ethylene glycol electrolyte

Kun Zhao,Sheng Wang,Jinglin Lu,Changjun Ni,Mingzhe Wang,Shudong Wang

DOI: https://doi.org/10.1016/j.surfcoat.2021.127707

IF: 4.865

2021-11-01

Surface and Coatings Technology

Abstract:The nanoporous film has been widely studied because of its unique properties, of which the self-organizing porous array is significant for various potential applications. Herein, the self-organized porous film with the diameter of 43-104nm was fabricated on FeCrAl alloy by anodic oxidation in perchloric acid-based electrolyte. And the pore diameter linearly varied with the applied voltage from 40V to 70V. The evolution of porous films were investigated via HIM and AFM. The pore depth firstly increased, kept constant and then decreased. The ordered pore was formed within initial 3-5min. To elucidate the anodizing mechanism, the composition of anodic film and precipitate were analyzed by XPS and FTIR respectively. Possible formation mechanism of the anodic films on the FeCrAl substrate was proposed: the porous film was sourced from the coordination compound, which consisted of metal ions (Fe2+, Fe3+, Al3+ and Cr3+) and carboxyl organic compounds from ethylene glycol oxidization. In the anodic film, the atomic concentration followed the order of Al > Fe > Cr. The study provided for the guideline for enhancing the mechanical strength between metallic substrate and coating.

physics, applied,materials science, coatings & films
Structural and Hydrophilic Properties of Nanoporous Aluminium Oxide Film as a Function of Voltage Anodization

Alireza Grayeli,Parvin Balashabadi,majid larijani

DOI: https://doi.org/10.1149/2162-8777/ad8bf2

IF: 2.2

2024-10-30

ECS Journal of Solid State Science and Technology

Abstract:The impact of voltage on the formation of nanopores through electrochemical anodization of high-purity aluminum was examined. The electrochemical bath was carefully prepared with oxalic acid electrolyte, while a 99.5% pure aluminum electrode served as the cathode and an aluminum template as the anode. The anodization process was conducted at room temperature, with voltage increments ranging from 20V to 65V, which was made possible by the in-house electrochemical cell. Notably, each incremental increase in voltage yielded a significant surge in current density, accompanied by a marked expansion in nanopore size, growing from approximately 35 nm to 125 nm. X-ray diffractometry, scanning electron microscopy, energy-dispersive X-ray spectroscopy, and Rutherford backscattering spectrometry were used to characterize the films. A slight phase change was observed in the aluminum substrate's FCC structure after the anodization process, transitioning to a monoclinic structure at 39° and 45° for all applied potentials. The stoichiometry of the films was determined through RBS analysis. The nano pores' resulting morphology and phase composition were further examined using SEM and EDS, providing insights into their structural characteristics. Furthermore, the water contact angle of the anodized aluminum oxide samples was measured, revealing a range of approximately 85.16 to 61.01 degrees.

materials science, multidisciplinary,physics, applied

Fabrication and Application of Nano-Porous Aluminum

Fabrication of Nanostructure by Porous Anodic Alumina

Fabrication and application of nanoporous anodic aluminum oxide: a review

A Controllable and Widely Applicable Electrochemical Anodization Process to Fabricate Porous Anodic Aluminum Oxide Membrane

Fabrication of in Situ Ultrathin Anodic Aluminum Oxide Layers for Nanostructuring on Silicon Substrate

A highly controlled fabrication of porous anodic aluminium oxide surface with versatile features by spatial thermo-anodization

Electrochemical Fabrication Of Novel Nanostructures Based On Anodic Alumina

Synthesis and characterization of porous anodic aluminum oxide with precise controllable pore diameter

A Highly Controllable Electrochemical Anodization Process to Fabricate Porous Anodic Aluminum Oxide Membranes

Fabricating Anodic Aluminum Oxide by Anodic-Oxidation

Anti-Corrosion Property of Atomic Layer Deposition Films for Anodized Aluminum

Ordering and Modification of Nanopores in Porous Anodic Aluminum Membranes

Fabrication of Anodic Aluminum Oxide Template and Cu Nanowire Surface Fastener

Fabrication of micro/nanoporous templates with a novel hierarchical structure by anodization of a patterned aluminum surface

T0301-1-1 Fabrication of Au Nanowire Utilizing Porous Aluminum

Utilizing Cell Culture Assisted Anodization to Fabricate Aluminium Oxide with a Gradient Microstep and Nanopore Structure

Porous and Ag-, Cu-, Zn-Doped Al2O3 Fabricated via Barrier Anodizing of Pure Al and Alloys

Progress in Nano-Engineered Anodic Aluminum Oxide Membrane Development

Facile fabrication of a robust and corrosion resistant superhydrophobic aluminum alloy surface by a novel method

Fabrication and characterization of anodic films onto the FeCrAl stainless steel in ethylene glycol electrolyte

Structural and Hydrophilic Properties of Nanoporous Aluminium Oxide Film as a Function of Voltage Anodization