Ordering and Modification of Nanopores in Porous Anodic Aluminum Membranes

Zhaoqian Liu,Gaoshan Huang,Menglin Li,Jinxing Li,Yifang Chen,Yongfeng Mei,Ran Liu

DOI: https://doi.org/10.1016/j.mee.2012.04.001

IF: 2.3

2012-01-01

Microelectronic Engineering

Abstract:Anodic aluminum oxide (AAO) has attracted significant intension for decades owing to its extensive applications in nanoscale science and technology. Novel structures, like nanoparticles, nanotubes, nanowires, etc., have been developed based on AAO templates and widely applied in optics, micro/nano electronics and microfluidic systems, etc. In this work, three approaches have been developed to control and modify the parameters and arrangement of nanopores in anodized alumina, including the change of electrochemical conditions, guiding the growth of nanopores by highly aligned line structure, and further modification of nanopores by physical vapor deposition. Moreover, highly oriented line structures used to guide the channel growth have been fabricated under optimal conditions and could be utilized as templates to form wrinkled membranes, nanowires, etc. We conclude that electrochemical anodization should be a very promising technique for the fabrication of various nanoscale structures leading to potential applications in optics, solar systems and micro/nano electronics.