Fabrication of Nanostructure by Porous Anodic Alumina

任刚,陈皓明

DOI: https://doi.org/10.3321/j.issn:1005-023x.2002.10.015

2002-01-01

Abstract:Although anodic aluminum oxidation has been widely used,the value of porous anodic alumina (PAA )for nanostructure fabrication has been recognized and attracted much attention only in recent years.The oxidation mechanism,fabrication method and recent research progress are reviewed.

What problem does this paper attempt to address?

Fabrication and Application of Nano-Porous Aluminum

黄瑞青,党建印,黄靖云

DOI: https://doi.org/10.3969/j.issn.1671-4776.2002.05.005

2002-01-01

Abstract:The fabrication technique of nano-porous aluminum by anodic oxidation is introduced in this paper. The porous size of anodic aluminum can be controlled in nanometer, so anodic ox-idation porous aluminum can be wildly used for the fabrication of semiconductor nano-materials.
Electrochemical Fabrication Of Novel Nanostructures Based On Anodic Alumina

Xs Peng,Ac Chen

DOI: https://doi.org/10.1088/0957-4484/15/7/005

IF: 3.5

2004-01-01

Nanotechnology

Abstract:A novel nanostructured sandwich PAA/Al/PAA (PAA: porous anodic alumina) was successfully designed and fabricated by anodic oxidation on both sides of an At foil. The pore size of the PAA membranes was controlled by choosing appropriate voltage, length of anodic oxidization time, temperature and electrolytes. The thickness of the central At layer was varied by changing the anodic oxidization time. We show that the nanostructured sandwich PAA/Al/PAA can be used as a template in fabricating homogeneous or heterogeneous nanostructured sandwiches by depositing the same kind of material or different materials into the PAA membranes of the sandwich. We also show that it can be used to prepare nanowires and bipolar electrodes. In addition, Al nanosheets or Al nanowalls were produced by removing the PAA films completely or partially. Nanogaps between the PAA films were also formed by etching away the centre At layer of the sandwich structures. The thickness of these nanosheets, nanowalls and nanogaps was controlled by choosing appropriate electrolytes and electrochemical parameters during the anodic oxidation of At. All these nanostructures offer novel opportunities for both fundamental research and technological applications of low dimensional nanostructure systems.
Fabrication and application of nanoporous anodic aluminum oxide: a review

Sixiang Liu,Junlong Tian,Wang Zhang

DOI: https://doi.org/10.1088/1361-6528/abe25f

IF: 3.5

2021-03-10

Nanotechnology

Abstract:Abstract Due to the unique optical and electrochemical properties, large surface area, tunable properties, and high thermal stability, nanoporous anodic aluminum oxide (AAO) has become one of the most popular materials with a large potential to develop emerging applications in numerous areas, including biosensors, desalination, high-risk pollutants detection, capacitors, solar cell devices, photonic crystals, template-assisted fabrication of nanostructures, and so on. This review covers the mechanism of AAO formation, manufacturing technology, the relationship between the properties of AAO and fabrication conditions, and applications of AAO. Properties of AAO, like pore diameter, interpore distance, wall thickness, and anodized aluminum layer thickness, can be fully controlled by fabrication conditions, including electrolyte, applied voltage, anodizing and widening time. Generally speaking, the pore diameter of AAO will affect its specific application to a large extent. Moreover, manufacturing technology like one/two/multi step anodization, nanoimprint lithography anodization, and pulse/cyclic anodization also have a major impact on overall array arrangement. The review aims to provide a perspective overview of the relationship between applications and their corresponding AAO pore sizes, systematically. And the review also focuses on the strategies by which the structures and functions of AAO can be utilized.

materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology
Ordering and Modification of Nanopores in Porous Anodic Aluminum Membranes

Zhaoqian Liu,Gaoshan Huang,Menglin Li,Jinxing Li,Yifang Chen,Yongfeng Mei,Ran Liu

DOI: https://doi.org/10.1016/j.mee.2012.04.001

IF: 2.3

2012-01-01

Microelectronic Engineering

Abstract:Anodic aluminum oxide (AAO) has attracted significant intension for decades owing to its extensive applications in nanoscale science and technology. Novel structures, like nanoparticles, nanotubes, nanowires, etc., have been developed based on AAO templates and widely applied in optics, micro/nano electronics and microfluidic systems, etc. In this work, three approaches have been developed to control and modify the parameters and arrangement of nanopores in anodized alumina, including the change of electrochemical conditions, guiding the growth of nanopores by highly aligned line structure, and further modification of nanopores by physical vapor deposition. Moreover, highly oriented line structures used to guide the channel growth have been fabricated under optimal conditions and could be utilized as templates to form wrinkled membranes, nanowires, etc. We conclude that electrochemical anodization should be a very promising technique for the fabrication of various nanoscale structures leading to potential applications in optics, solar systems and micro/nano electronics.
A Controllable and Widely Applicable Electrochemical Anodization Process to Fabricate Porous Anodic Aluminum Oxide Membrane

Yuanjing Lin,Qingfeng Lin,Xue Liu,Yuan Gao,Zhiyong Fan

DOI: https://doi.org/10.1149/ma2015-02/31/1181

2015-01-01

ECS Meeting Abstracts

Abstract:Inspired by the versatile applications of porous alumina nanostructures on solar cells, supercapacitors, biosensors, and so forth, research on fabrication of anodized aluminum oxide (AAO) with nanopore structure has achieved substantial advancements. Porous AAO membrane with nanostructures has become one of the most popular template materials for synthesis of a broad range of functional nanostructures such as nanowires, nanopillars, nanotubes, etc. While fabrication of highly ordered nanoporous AAO with tunable geometric features has been widely reported, its growth rate can be easily affected by the fluctuation of parameters such as acid concentration and temperature during the electrochemical anodization process. In order to meet the demand of fabricating AAO with various surface parameters and precise target pore depth control for scientific research and commercial applications, a controllable fabrication process is essential. Here, we developed a method which can implement precise pore depth control of AAO layer during the electrochemical anodization process, via monitoring the integrated charge. This method is applicable in a large voltage range and can be widely applied in fabrication of nanostructure with material such as TiO2and so on.
T0301-1-1 Fabrication of Au Nanowire Utilizing Porous Aluminum

Masahiro AMANO,Yuka IWASAKI,Yang JU

DOI: https://doi.org/10.1299/jsmemecjo.2010.8.0_167

2010-01-01

The proceedings of the JSME annual meeting

Abstract:This paper describes the fabrication of Au nanowire utilizing porous aluminum. To fabricate nanowires, at first Au film with the thickness of 100 nm was evaporated on one side of porous aluminum as a conductive working electrode. Nanowires were obtained via electrodeposition under a constant electrical potential about -3 V in 40g/l KAu(CN)_2, 100g/l KH_2PO_4 aqueous solution at room temperature. After etching in 3 M NaOH aqueous solution to remove porous aluminum, nanowires with the average diameter of 200 nm and length 8 approximately, were observed by scanning electron microscope. It was confirmed that the nanowires consisted of Au by energy dispersive X-ray analysis.
Formation Mechanism of Alumina Nanotubes and Nanowires from Highly Ordered Porous Anodic Alumina Template

YF Mei,GG Siu,RKY Fu,P Chen,XL Wu,TF Hung,PK Chu,Y Yang

DOI: https://doi.org/10.1063/1.1846137

IF: 2.877

2005-01-01

Journal of Applied Physics

Abstract:Alumina nanotube (ANT) and nanowire (ANW) arrays were produced from highly ordered porous anodic alumina (PAA) by etching in phosphoric acid and subsequent thermal treatment. The domain structures that have small sizes provide more boundaries and break the hexagonal symmetry of the PAA template, thereby inducing star-like splitting modes. Using very thin PAA films, ANTs and their arrays are fabricated, whereas ANWs and their arrays are produced when using thick films. This is due to the thin wall between nanopores. Our results provide some mechanistic and fundamental information pertaining to the fabrication of nanostructures via a PAA template.
Fabricating Anodic Aluminum Oxide by Anodic-Oxidation

Ji Yan He,Jian Dan Ren,Yan Bin He

DOI: https://doi.org/10.4028/www.scientific.net/amr.383-390.5522

2011-11-01

Advanced Materials Research

Abstract:Uniform parallel pores and controllable pore diameter make Anodic Aluminum Oxide (AAO) membrane one of the best materials in synthesis of one-dimensional nano-structured material. High orderly AAO template was prepared by anodic-oxidation. The prepared AAO membrane’s apertures ranged from 30 nm to 75 nm. Within a few microns, holes were orderly arranged. The fabricating methods of AAO template in different electrolyte were studied and the factors which affect the pore distribution, such as electrolyte types, voltage and concentration were discussed.
A Highly Controllable Electrochemical Anodization Process to Fabricate Porous Anodic Aluminum Oxide Membranes

Yuanjing Lin,Qingfeng Lin,Xue Liu,Yuan Gao,Jin He,Wenli Wang,Zhiyong Fan

DOI: https://doi.org/10.1186/s11671-015-1202-y

Nanoscale Res Lett

Abstract:Due to the broad applications of porous alumina nanostructures, research on fabrication of anodized aluminum oxide (AAO) with nanoporous structure has triggered enormous attention. While fabrication of highly ordered nanoporous AAO with tunable geometric features has been widely reported, it is known that its growth rate can be easily affected by the fluctuation of process conditions such as acid concentration and temperature during electrochemical anodization process. To fabricate AAO with various geometric parameters, particularly, to realize precise control over pore depth for scientific research and commercial applications, a controllable fabrication process is essential. In this work, we revealed a linear correlation between the integrated electric charge flow throughout the circuit in the stable anodization process and the growth thickness of AAO membranes. With this understanding, we developed a facile approach to precisely control the growth process of the membranes. It was found that this approach is applicable in a large voltage range, and it may be extended to anodization of other metal materials such as Ti as well.
Fabrication of micro/nanoporous templates with a novel hierarchical structure by anodization of a patterned aluminum surface

Le Shen,Yi Li,Wenjin Zhong,Jingcheng Wu,Jianhua Cheng,Ling Jin,Xing Hu,Zhiyuan Ling

DOI: https://doi.org/10.1016/j.elecom.2021.107014

IF: 5.443

2021-05-01

Electrochemistry Communications

Abstract:<p>Hierarchical functional materials with various micro/nanostructures have attracted widespread attention because of their particular physical and chemical characteristics. Finding appropriate methods for the preparation of hierarchical functional materials has thus become a hot topic for research. In the present work, micro/nanoporous templates with a novel hierarchical structure have been fabricated by anodization of a patterned aluminum surface. Firstly, a layer of nail gel (CA600) is applied to the surface of an electropolished aluminum sheet by spin coating. After drying, interconnected microscale cracks are formed on the surface of the aluminum sheets, forming a patterned aluminum surface. Secondly, the aluminum sheets are anodized in 0.3 M oxalic acid electrolyte at 30−50 V (15 <sup>o</sup>C) to form micro/nanoporous templates with a novel hierarchical structure. The effect of spinning rate, spinning time, and anodization voltage on the microstructure of the porous templates has been studied in detail. The porous templates can be used to prepare various hierarchical functional materials.</p>

electrochemistry
Utilizing Cell Culture Assisted Anodization to Fabricate Aluminium Oxide with a Gradient Microstep and Nanopore Structure

Zhiying Zhang,Yiyan Guo,Jiangbo Lu,Juan Li,Yingjun Ma,Ting Liu,Ruiqing Liang,Runguang Sun,Jun Dong

DOI: https://doi.org/10.1021/acsomega.2c03471

IF: 4.1

2022-10-18

ACS Omega

Abstract:Anodic aluminum oxide (AAO) with a gradient microstep and nanopore structure (GMNP) is fabricated by inversely using cell culture to control the reaction areas in the electrochemical anodization, which shows a larger porosity than that of typical planar AAO. The figure of the microstep is influenced by the cell dehydration temperature which controls the cell shrinkage degree. A GMNP AAO with a diameter of 2.5 cm is achieved. Polymer with a gradient microstep and nanonipple structure is...

chemistry, multidisciplinary
Advances in the Fabrication of Nanoporous Anodic Aluminum Oxide and Its Applications to Sensors: A Review

Chin-An Ku,Chung-Yu Yu,Chia-Wei Hung,Chen-Kuei Chung

DOI: https://doi.org/10.3390/nano13212853

2023-10-27

Abstract:Nanoporous anodic aluminum oxide (AAO) is an important template for 1D nanomaterial synthesis. It is used as an etching template for nanopattern transfer in a variety of contexts, including nanostructured material synthesis, electrical sensors, optical sensors, photonic and electronic devices, photocatalysis, and hardness and anticorrosion improvement. In this review, we focus on various fabrication methods, pore geometry modification, and recent advances of AAO, as well as sensor applications linked to our environment, daily life, and safety. Pore geometry is concerned with the material composition, applied voltage mold, electrolyte type, temperature, and anodizing time during the fabrication of AAOs and for adjusting their pore size and profile. The applied voltage can be divided into four types: direct current anodization (DCA), reverse pulse anodization, pulse anodization (PA), and hybrid pulse anodization (HPA). Conventional AAOs are fabricated using DCA and mild anodization (MA) at a relatively low temperature (-5~15 °C) to reduce the Joule heating effect. Moreover, the issues of costly high-purity aluminum and a long processing time can be improved using HPA to diminish the Joule heating effect at relatively high temperatures of 20-30 °C with cheap low-purity (≤99%) aluminum. The AAO-based sensors discussed here are primarily divided into electrical sensors and optical sensors; the performance of both sensors is affected by the sensing material and pore geometry. The electrical sensor is usually used for humidity or gas measurement applications and has a thin metal film on the surface as an electrode. On the contrary, the AAO optical sensor is a well-known sensor for detecting various substances with four kinds of mechanisms: interference, photoluminescence, surface plasma resonance, and surface-enhanced Raman scattering (SERS). Especially for SERS mechanisms, AAO can be used either as a solid support for coating metal nanoparticles or a template for depositing the metal content through the nanopores to form the nanodots or nanowires for detecting substances. High-performance sensors will play a crucial role in our living environments and promote our quality of life in the future.
Fabrication of porous anodic alumina (PAA) templates with straight pores and with hierarchical structures through exponential voltage decrease technique

Leandro Sacco,Ileana Florea,Costel Sorin Cojocaru

DOI: https://doi.org/10.48550/arXiv.1910.11197

2019-10-24

Applied Physics

Abstract:The oxide barrier layer at the bottom of the pores has been successfully thinned by applying an exponential voltage decrease process followed by a wet chemical etching. The impact of the potential drop on the porous anodic alumina (PAA) structure has been deeply investigated, as well as the electrolyte temperature, the number of potential steps and the exponential decay rate. The results presented herein evidence that straight pores can be obtained and simultaneously remove the dielectric layer in spite of applying the exponential voltage decay during the PAA synthesis, through a smart adjustment between the anodization conditions and exponential voltage decay parameters. Additionally, the PAA structure can be tuned to fabricate hierarchically nanoporous templates with secondary pores ranging from 2 up to 10 branches. The presented simple procedure aims to become a standard step for the fabrication of the next generation PAA templates based devices.
Petal-Like Morphology on the Surface of Porous Anodic Alumina

ye song,qiu mei ye,peng liu,jun jun hu,x h zhu

DOI: https://doi.org/10.4028/www.scientific.net/AMR.194-196.818

2011-01-01

Abstract:The formation process of a petal-like morphology on the surface of porous anodic alumina (PAA) is discussed in detail. During the anodizing process, the electronic current is produced within the growing oxide, which results in the oxygen evolution at the pore bottom. The pressure of the oxygen bubbles increases along with the anodizing process, and their high pressure acts as a driving-force of the micro-gas-flow, resulting in the micro-liquid-flow in the pores of PAA. The micro-liquid-flow can flow into each other between a center pore and the nearest neighboring pores. The nanogroove between two pores can be formed due to the dissolving effect during the process of micro-liquid-flow between the two pores. This leads to the formation of the petal-like morphology on the PAA surface. As the micro-liquid-flow leaves off the pore bottom, there a local vacuum is formed. This local vacuum behaves as a driving-force of the micro-liquid-flow, making the electrolyte renovated in the nanopores. The renovated electrolyte can provide enough anions or impurity centers, which are the cause of the generation of the electronic current. The self-organizing for the petal-like morphology on PAA surface is mainly dependent upon the high pressure of the oxygen bubbles and the local vacuum produced at the pore bottom. The present results may help us to understand the nature of the self-organization in the porous anodic oxides.
Synthesis and characterization of porous anodic aluminum oxide with precise controllable pore diameter

Xue Zheng,Zhimou Xu

DOI: https://doi.org/10.1117/12.2626542

2022-01-21

Abstract:The preparation of low-cost and large-area nanostructures is one of the frontier hotspots and difficulties in the field of nanotechnology. We propose a method for the preparation of nanostructures by using plasma to etch anodic aluminum oxide (AAO) membrane. The transmission characteristics of plasma particles in AAO nanopores are explored. And the precise control of the porous AAO structure is achieved. The nanostructure is successfully transferred to the LED chip, and the luminous efficiency is improved. These studies will provide a good theoretical and technical basis for the precise transfer of nanostructures and the low-cost preparation of large-area nanostructured devices.
Fabrication of Alumina Nanowires via Anodic Oxidation of Aluminum

Xu Zhou,Pu Lin,Lin Zixia,Li Xinghua,Pan Lijia,Shi Yi

DOI: https://doi.org/10.3969/j.issn.1671-4776.2010.06.004

2010-01-01

Abstract:Alumina nanowires were fabricated by high voltage anodization of an aluminum sheet.The formation mechanism was discussed in detail.During the anodization procedure,the microstructure cell array split along the thinnest positions under mechanical stress existing in alumina membranes when the porous alumina membranes grew,thus the alumina nanowires were fabricated.According to the characterizations of scanning electron microscope(SEM)and transmission electron microscope(TEM),the morphologies of separated alumina nanowires are uniform triangular prism with concave and cylindrical side-faces.The alumina nanowires are 30-300 nm in diameter and several to tens of micrometers in length.The specific surface value of brunauerem-mett-teller(BET)measurement is 5.8×104 m2/kg,approximating to the theoretical value of 6.2×104 m2/kg.The experimental results show that these one-dimensional alumina nanostructures have strong absorbability to ultrafine nanoparticles of Ag and CdS.They can absorb nanoparticles(the diameter less than 10 nm)that are too small to be eliminated by conventional filters or centrifuges.Therefore,the as-prepared alumina nanowires will be useful as super absorbents or filters.
Self-Ordered Porous Anodic Alumina with Large Pore Intervals: Review on Experimental and Theoretical Research

Małgorzata Norek

DOI: https://doi.org/10.1149/1945-7111/aca937

IF: 3.9

2022-12-07

Journal of The Electrochemical Society

Abstract:The production of self-organized porous anodic alumina (PAA) with large intepore intervals (Dc > 380 nm) is still under development. The PAA is very interesting for applications in optics and photonics where a large-scale periodicity corresponding to visible or infrared light is required. However, the process remains challenging because it usually involves anodization under high voltages that is prone to instabilities and breakdown events. The basic problem relies on harnessing the electrochemical conditions to find a balance between various phenomena that occur during transformation from aluminum to porous alumina. The overall process is quite complicated but it is believed that regularity of pore formation is governed mainly by an equilibrated counter-ion (Al3+ and electrolyte anions A-) exchange at the electrolyte/oxide interface. Accordingly, a new concept of PAA growth is proposed which takes into account three basic elements of field-enhanced dissolution, plastic flow, and electro-convective models. The results on recent achievements in the high-voltage anodization is discussed focusing on the strategies that led to the self-ordering growth of PAA with large Dc. It is hoped that the review will contribute to better designing of anodization parameters to produce the ordered porous material with desired morphology.

electrochemistry,materials science, coatings & films
Progress in Nano-Engineered Anodic Aluminum Oxide Membrane Development

Gerrard Eddy Jai Poinern,Nurshahidah Ali,Derek Fawcett

DOI: https://doi.org/10.3390/ma4030487

IF: 3.4

2011-02-25

Materials

Abstract:The anodization of aluminum is an electro-chemical process that changes the surface chemistry of the metal, via oxidation, to produce an anodic oxide layer. During this process a self organized, highly ordered array of cylindrical shaped pores can be produced with controllable pore diameters, periodicity and density distribution. This enables anodic aluminum oxide (AAO) membranes to be used as templates in a variety of nanotechnology applications without the need for expensive lithographical techniques. This review article is an overview of the current state of research on AAO membranes and the various applications of nanotechnology that use them in the manufacture of nano-materials and devices or incorporate them into specific applications such as biological/chemical sensors, nano-electronic devices, filter membranes and medical scaffolds for tissue engineering.

materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,metallurgy & metallurgical engineering
Wettability of Porous Anodic Alumina Surface

Li Ang,Qin Li,Wang Jiadao,Chen Darong,Sui Tao

DOI: https://doi.org/10.3969/j.issn.0254-0150.2009.08.006

2009-01-01

Abstract:Porous anodic alumina(PAA) was obtained by anodic oxidation of a high purity aluminum in 10%(volume fraction) phosphoric acid electrolyte.A material of low surface energy was deposited on PAA surface to obtain a hydrophobic surface.The wettability of PAA surface in different anodic oxidation conditions and post-processes was studied.The experimental results indicate that ultra-hydrophobic PAA surface with a contact angle of 155°could be achieved.The effect of anodic oxidation conditions on wettability of PAA surface is as following:the less roughness of PAA surface is,the lager contact angle after depositing low surface energy material is;hydrophobicity of PAA,whose nano-hole diameter is between 160 nm and 190 nm,is the best;PAA whose thickness is equal with or greater than 1.7 μm could change surface wettability;there are no obvious differences between anodic oxidation in constant voltage and constant current.
Current Regulation and Property Study of Porous Anodic Alumina Films with a Periodic Pore Structure

Tian Lan,Xinjian Xie,Qin Xu,Qi Peng,Lu Zhang,Meiyu Dong

DOI: https://doi.org/10.1021/acsomega.0c04452

IF: 4.1

2021-03-17

ACS Omega

Abstract:Porous anodic alumina (PAA) films with periodically modulated pore diameters are prepared by cyclic anodization of Al in a 0.6 M H3PO4 solution at room temperature. Studies have demonstrated that the oscillating current signals have an important effect on the structures of PAA films. Scanning electron microscopy (SEM) images of the PAA film show that when the positive triangle wave current signal is applied, with the increase in the maximum current value, PAA gradually exhibits a symmetrically modulated pore diameter structure, and part of the pores generates slub-like branches. When the maximum current value is 60 mA, the effect of modulation on the pore diameter is the most obvious and the UV reflectance spectrum shows the lowest reflectivity. A sawtooth wave current signal will cause the generation of a V-shaped structure at the junction of adjacent oxide layers. This work provides important guidance for regulating the structure of PAA by changing the current signal.This article has not yet been cited by other publications.

chemistry, multidisciplinary

Fabrication of Nanostructure by Porous Anodic Alumina

Fabrication and Application of Nano-Porous Aluminum

Electrochemical Fabrication Of Novel Nanostructures Based On Anodic Alumina

Fabrication and application of nanoporous anodic aluminum oxide: a review

Ordering and Modification of Nanopores in Porous Anodic Aluminum Membranes

A Controllable and Widely Applicable Electrochemical Anodization Process to Fabricate Porous Anodic Aluminum Oxide Membrane

T0301-1-1 Fabrication of Au Nanowire Utilizing Porous Aluminum

Formation Mechanism of Alumina Nanotubes and Nanowires from Highly Ordered Porous Anodic Alumina Template

Fabricating Anodic Aluminum Oxide by Anodic-Oxidation

A Highly Controllable Electrochemical Anodization Process to Fabricate Porous Anodic Aluminum Oxide Membranes

Fabrication of micro/nanoporous templates with a novel hierarchical structure by anodization of a patterned aluminum surface

Utilizing Cell Culture Assisted Anodization to Fabricate Aluminium Oxide with a Gradient Microstep and Nanopore Structure

Advances in the Fabrication of Nanoporous Anodic Aluminum Oxide and Its Applications to Sensors: A Review

Fabrication of porous anodic alumina (PAA) templates with straight pores and with hierarchical structures through exponential voltage decrease technique

Petal-Like Morphology on the Surface of Porous Anodic Alumina

Synthesis and characterization of porous anodic aluminum oxide with precise controllable pore diameter

Fabrication of Alumina Nanowires via Anodic Oxidation of Aluminum

Self-Ordered Porous Anodic Alumina with Large Pore Intervals: Review on Experimental and Theoretical Research

Progress in Nano-Engineered Anodic Aluminum Oxide Membrane Development

Wettability of Porous Anodic Alumina Surface

Current Regulation and Property Study of Porous Anodic Alumina Films with a Periodic Pore Structure