Abstract:Summary form only given. Experiments on individual nanoparticles are generally difficult but can be carried out by the techniques of modern in-situ electron microscopy. With the continuous improvement of in situ techniques inside transmission electron microscope (TEM), the capabilities of TEM extend beyond structural characterization to high-precision nanofabrication and property measurement, which not only enriches the experimental methods of nanoresearch, but also provides new opportunities for the development in nanoscience and nanotechnology. Based on the idea of “setting up a nanolab inside a TEM”, we review our recent progress in atomic resolution nanofabrication and dynamic characterization of structure and properties of nanomaterials. The electron beam can be used as a tool to induce nanofabrication on an atomic scale. Selective irradiation of MWNTs with a focused electron beam can induce changes of their shape such as cutting, bending, welding and drilling a hole on them. In addition, metal crystals can be encapsulated inside graphitic nanocontainers that were designed for in-situ electron irradiation experiments. Under irradiation, the carbon shells contract and lead to compressive forces. By measuring the lattice spacings in HRTEM images of metal crystals inside graphitic shells, pressures on the order 10-20 GPa were determined. Non-hydrostatic pressure, e.g., inside collapsing nanotubes, may deform the crystals considerably. This can be used for studying the deformation behaviour of individual nanometer-sized crystals. Fig. 1 shows how a Co wire inside a carbon nanotube is deformed and extruded when the the nanotube collapses locally under electron irradiation. Another deformation cell, allowing the detailed study of crystal deformation, was designed by electron-beam structuring, as shown in Fig. 2. A 'carbon onion', encapsulating a Au crystal, was punctured by a fully focused electron beam and subsequently exposed to uniform irradiati- n so that the Au crystal was slowly extruded through the hole. The interaction between metal and carbon was also studied on an atomic scale by introducing Au and Pt atoms into graphene layers. Individual Au or Pt atoms were observed by HRTEM at different temperatures and their migration was monitored. Fig. 3 shows drilling a Snm-diameter hole by electron beam on graphene for third-generation gene sequencing. The mechanism of electron-beam induced high-resolution nanofabrication was also discussed.

Nanoscale Semiconductor Processes Using STM and AFM Lithographies. Fabrication of Nanometer-to-atomic-scale Structures Using STM and AFM.

Atomic-scale manipulation and in situ characterization with scanning tunneling microscopy

Nanomanipulation and Nanofabrication with Multi-Probe Scanning Tunneling Microscope: from Individual Atoms to Nanowires

Development of STM-based Nanofabrication and Measurement System for Nano Devices.

Nano-fabrication System Based on Atomic Force Microscopy

STM Single Atom Manipulation Technology and Its Physical Mechanism

STM Single Atom/Molecule Manipulation and Its Application to Nanoscience and Technology

Nanofabrication with atomic force microscopy.

Towards atomically precise manipulation of 2D nanostructures in the electron microscope

Towards Atomic-Scale Fabrication in Silicon

Fabrication of the Nanoscale Flat-Bottomed and Lamellar Structures on HOPG Surface by STM-Based Electric Lithography

Nanostructure fabrication on silicon surfaces by atom transfer from a gold tip using an ultrahigh vacuum scanning tunneling microscope

Manufacturing Structures in Nanometer Scale by Nanomanipulation

Advanced methodologies for atomic-scale nanofabrication and dynamic characterization

Atomic Calligraphy: The Direct Writing of Nanoscale Structures using MEMS

Nano-Fabrication in Different Fabrication Parameters by AFM

Nano-Lithography in Ultra-High Vacuum (UHV) for Real World Applications

Atomic resolution nanofabrication and dynamic characterization.

Silicon Nanofabrication by Atomic Force Microscopy-Based Mechanical Processing

Fabricating Artificial Nanostructures with a Scanning Tunneling Microscope

The Atomic Drill Bit: Precision Controlled Atomic Fabrication of 2D Materials