Abstract:We developed a new platform that enables in-situ four-probe electronic measurements, in-situ three-probe field-effect measurements, nanomanipulation, and in-situ modification of nanodevices inside a transmission electron microscope (TEM). The platform includes a specially designed chip-holder and a silicon (Si) chip with suspended metal electrodes. The chip-holder can hold one Si chip with a size up to 3 mm x 3 mm and provides four electrical connections that can be connected to the micrometer-sized electrodes on the Si chip by wire-bonding. The other side of the electrical connections on the chip-holder is connected to the electronic instruments outside the TEM through a commercial Nanofactory SPM-TEM holder. The Si chip with suspended metal electrodes on one of its edges was fabricated by lithography and wet etching. Carbon nanotubes (CNTs), InAs nanowires, and tungsten disulfide nanowires were placed to stride over and connect to the suspended electrodes on the Si chip by nanomanipulations inside a scanning electron microscope (SEM). By using the platform, I-V curves of an individual single-walled CNT connecting to four electrodes were in-situ measured between any two of the four suspended electrodes, and a high-resolution TEM image of the same CNT was obtained. Furthermore, four-terminal I-V measurement on an InAs nanowire was achieved on this platform, and with a movable probe used as a gate electrode, field-effect measurement on the same InAs nanowire device was accomplished in SEM. In addition, by using the movable probe on the SPM-TEM holder, we could further in-situ modify nanomaterial and nanodevices. The present work demonstrates a method that allows a direct correlation between the atomic-level structure and the electronic property of nanomaterials or nanodevices whose structure can be further modified in-situ.

Development of STM-based Nanofabrication and Measurement System for Nano Devices.

Nanostructure fabrication on silicon surfaces by atom transfer from a gold tip using an ultrahigh vacuum scanning tunneling microscope

Nanoscale Semiconductor Processes Using STM and AFM Lithographies. Fabrication of Nanometer-to-atomic-scale Structures Using STM and AFM.

Nano-fabrication System Based on Atomic Force Microscopy

Design and test of the nanostructure-reaccessible UHVSTM system

Nano-Lithography in Ultra-High Vacuum (UHV) for Real World Applications

Nanofabrication of the gold scanning probe for the STM-SECM coupling system with nanoscale spatial resolution

SPM-based Nanofabrication Using a Synchronization Technique

Dual Tunneling Unit Scanning Tunneling Microscope for Nano-Metrology

Nanomanipulation and Nanofabrication with Multi-Probe Scanning Tunneling Microscope: from Individual Atoms to Nanowires

A wide-range metrology AFM and its applications

Construction of a novel in-situ measurement system combining SEM with a STM-TEM holder

Development and Performance of the Nanoworkbench: A Four Tip STM for Electrical Conductivity Measurements Down to Sub-micrometer Scales

A novel scanning tunneling microscopy for long range and high aspect ratio measurement

Developmentand and Application of Vector-mode Nanofabrication System by Modulating Electric Signals Based on AFM

Four-Probe Scanning Tunnelling Microscope with Atomic Resolution for Electrical and Electro-Optical Property Measurements of Nanosystems

Development of SPM Nanofabrication System in Air

CMOS Platform for Atomic-Scale Device Fabrication

Atomic-scale manipulation and in situ characterization with scanning tunneling microscopy

Advanced methodologies for atomic-scale nanofabrication and dynamic characterization

A platform for in-situ multi-probe electronic measurements and modification of nanodevices inside a transmission electron microscope.