Abstract:We developed a new platform that enables in-situ four-probe electronic measurements, in-situ three-probe field-effect measurements, nanomanipulation, and in-situ modification of nanodevices inside a transmission electron microscope (TEM). The platform includes a specially designed chip-holder and a silicon (Si) chip with suspended metal electrodes. The chip-holder can hold one Si chip with a size up to 3 mm x 3 mm and provides four electrical connections that can be connected to the micrometer-sized electrodes on the Si chip by wire-bonding. The other side of the electrical connections on the chip-holder is connected to the electronic instruments outside the TEM through a commercial Nanofactory SPM-TEM holder. The Si chip with suspended metal electrodes on one of its edges was fabricated by lithography and wet etching. Carbon nanotubes (CNTs), InAs nanowires, and tungsten disulfide nanowires were placed to stride over and connect to the suspended electrodes on the Si chip by nanomanipulations inside a scanning electron microscope (SEM). By using the platform, I-V curves of an individual single-walled CNT connecting to four electrodes were in-situ measured between any two of the four suspended electrodes, and a high-resolution TEM image of the same CNT was obtained. Furthermore, four-terminal I-V measurement on an InAs nanowire was achieved on this platform, and with a movable probe used as a gate electrode, field-effect measurement on the same InAs nanowire device was accomplished in SEM. In addition, by using the movable probe on the SPM-TEM holder, we could further in-situ modify nanomaterial and nanodevices. The present work demonstrates a method that allows a direct correlation between the atomic-level structure and the electronic property of nanomaterials or nanodevices whose structure can be further modified in-situ.

Nanofabrication of the gold scanning probe for the STM-SECM coupling system with nanoscale spatial resolution

Nanoscale Imaging of Surface Topography and Reactivity with the Scanning Electrochemical Microscope

Electrochemical Fabrication of Nanoporous Gold

Electrochemical Preparation of STM Probes for High Aspect Ratio Nanometrology

Nanomanipulation and Nanofabrication with Multi-Probe Scanning Tunneling Microscope: from Individual Atoms to Nanowires

Nanostructure fabrication on silicon surfaces by atom transfer from a gold tip using an ultrahigh vacuum scanning tunneling microscope

Fabrication and Characterization of Probes for Combined SPM Techniques Based on PECVD

SPM-based Nanofabrication Using a Synchronization Technique

A platform for in-situ multi-probe electronic measurements and modification of nanodevices inside a transmission electron microscope.

Simulation-guided Nanofabrication of High-Quality Practical Tungsten Probes

Long-Lived Gold Single-Atom Junctions Formed by a Flexible Probe for Scanning Tunneling Microscopy Applications

Direct Nanomachining on Semiconductor Wafer by Scanning Electrochemical Microscopy

AFM Manipulation of Gold Nanowires To Build Electrical Circuits

Simultaneous Nanomechanical and Electrochemical Mapping: Combining Peak Force Tapping Atomic Force Microscopy with Scanning Electrochemical Microscopy

Probing Electronic Transport of Individual Nanostructures with Atomic Precision

Development of STM-based Nanofabrication and Measurement System for Nano Devices.

Fabrication of nanostructure on Au nano-film by nanosecond laser coupled with cantilevered scanning near-field optical microscopy probe

Fabrication of Metal Nanoelectrodes by Interfacial Reactions

Theoretical and experimental verification of imaging resolution factors in scanning electrochemical microscopy

Fabrication of Nano-Scale Reference Materials with Scanning Probe Microscopy (Spm)-Based Lithography

A Gold Nano-Dot Modified Silicon Tip Apex for Scanning Kelvin Probe Microscopy