Abstract:Atomic force microscopy (AFM) tip-based nanofabrication is as a powerful method to machine nanostructures. However, the traditional AFM scratching process suffers from low processing efficiency and a low rate of material removal. Thus, an AFM tip-based nanomilling method was previously proposed to improve the machining efficiency and material removal rate; however, the machining mechanism of the nanomilling process, especially on hard-brittle silicon crystals, is not well understood. In this study, we used an AFM tip-based nanomilling approach to machine nanochannels on single-crystal silicon to investigate the machining mechanism (i.e., the material removal state, undeformed chip thickness, the brittle-to-ductile transition, and subsurface damage). For the first time, we established a theoretical model for tip-based nanomilling with a constant normal load to predict the machined depth. Nanochannels fabricated with a wide range of feed directions, crystal orientations, and tip trajectories were obtained, which provided a reference for machining high-quality nanochannels and an in-depth understanding of the nanomilling of single-crystal silicon. The experimental results demonstrated that we could machine a nanochannel without pile-ups by selecting a specific trajectory with a feed smaller than 4 nm in the 0 degrees direction, a normal load no greater than 120 mu N, and a crystal orientation at rotation angles of 135 degrees, 157.5 degrees, or 180 degrees. Moreover, transmission electron microscope analysis of the subsurface of the nanochannel revealed a large number of dislocations, stacking faults, and a layer of amorphous silicon. Our findings are of great significance for obtaining high-quality nanochannels with a predicable machined depth and understanding the nanomilling mechanism of hard-brittle materials.

Silicon Nanofabrication by Atomic Force Microscopy-Based Mechanical Processing

AFM Tip-Based Fabrication of Silicon Nanostructures with Reduced Subsurface Amorphous Layers

Atomic Force Microscope Using a Diamond Tip: a Tool for Micro/nanomachining on Single-Crystal Silicon Surface

Nano-Machining of Monocrystalline Silicon by Atomic Force Microscope

Nano-fabrication System Based on Atomic Force Microscopy

3-D finite element calculation of electric field enhancement for nanostructures fabrication mechanism on silicon surface with AFM tip induced local anodic oxidation

Measurement and Analysis of AFM-Based Nano-Indentation on Micro-Machined Silicon Surface

Three Dimensional Molecular Dynamics Simulation of Nano-Lithography Process for Fabrication of Nanocomponents in Micro Electro Mechanical Systems (MEMS) Applications

Impact of Various Parameters on Nanostructures Fabrication Mechanism on Silicon Surface with AFM Tip Induced Local Anodic Oxidation

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Nanoscale Semiconductor Processes Using STM and AFM Lithographies. Fabrication of Nanometer-to-atomic-scale Structures Using STM and AFM.

Study on Nanofabrication with Dynamic Electrical-Field-induced Anodic Oxidation

Fabrication of nanoscale to microscale 2.5D square patterns on metallic films by the coupling AFM lithography

Characteristics of Local Anodic Oxidation of Silicon Surfaces by AFM and Fabrication of Nanoscale Metrology Standard Sample

RESEARCH ON MICRO/NANO-MACHINING USING AN ATOMIC FORCE MICROSCOPE COMBINED WITH DIAMOND TIP

Friction-induced Nanofabrication on Monocrystalline Silicon

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Mechanism of mechanical nanolithography using self-excitation microcantilever

Fabrication of regular nanostructures on the surface of Si by AFM anodic oxidation

Recent Advances in AFM Tip-Based Nanomechanical Machining