Abstract:Despite decades of research, the ultimate goal of nanotechnology--top-down manipulation of individual atoms--has been directly achieved with only one technique: scanning probe microscopy. In this Review, we demonstrate that scanning transmission electron microscopy (STEM) is emerging as an alternative method for the direct assembly of nanostructures, with possible applications in plasmonics, quantum technologies, and materials science. Atomically precise manipulation with STEM relies on recent advances in instrumentation that have enabled non-destructive atomic-resolution imaging at lower electron energies. While momentum transfer from highly energetic electrons often leads to atom ejection, interesting dynamics can be induced when the transferable kinetic energies are comparable to bond strengths in the material. Operating in this regime, very recent experiments have revealed the potential for single-atom manipulation using the Angstrom-sized electron beam. To truly enable control, however, it is vital to understand the relevant atomic-scale phenomena through accurate dynamical simulations. Although excellent agreement between experiment and theory for the specific case of atomic displacements from graphene has been recently achieved using density functional theory molecular dynamics, in many other cases quantitative accuracy remains a challenge. We provide a comprehensive reanalysis of available experimental data on beam-driven dynamics in light of the state-of-the-art in simulations, and identify important targets for improvement. Overall, the modern electron microscope has great potential to become an atom-scale fabrication platform, especially for covalently bonded 2D nanostructures. We review the developments that have made this possible, argue that graphene is an ideal starting material, and assess the main challenges moving forward.

STM Single Atom/Molecule Manipulation and Its Application to Nanoscience and Technology

STM Single Atom Manipulation Technology and Its Physical Mechanism

Atomic-scale manipulation and in situ characterization with scanning tunneling microscopy

Stm Tip-Assisted Single Molecule Chemistry

DETECTING AND MANIPULATING SINGLE MOLECULES WITH STM

Nanomanipulation and Nanofabrication with Multi-Probe Scanning Tunneling Microscope: from Individual Atoms to Nanowires

Application of scanning tunneling microscope in single molecule science

Molecular Surgery with STM and Its Applications--a Powerful Tool for Nanoscience and Nanotechnology

Study of Single Molecules and Their Assemblies by Scanning Tunneling Microscopy

Nanoscale Semiconductor Processes Using STM and AFM Lithographies. Fabrication of Nanometer-to-atomic-scale Structures Using STM and AFM.

Robust procedure for creating and characterizing the atomic structure of scanning tunneling microscope tips

Investigation of Artificial Quantum Structures Constructed by Atom Manipulation

Towards atomically precise manipulation of 2D nanostructures in the electron microscope

Characterizing and Manipulating Individual Molecules by Scanning Tunneling Microscopy

Regulating the Interactions of Adsorbates on Surfaces by Scanning Tunneling Microscopy Manipulation

STM studies of single molecules: molecular orbital aspects.

High-Resolution Scanning Tunneling Microscopy for Molecules

CHARACTERIZATION AND MANIPULATION OF NANOSTRUCTURES BY A SCANNING TUNNELING MICROSCOPE

Atomic-Resolution Imaging of Micron-Sized Samples Realized by High Magnetic Field Scanning Tunneling Microscopy.

Perturbational Imaging of Molecules with the Scanning Tunneling Microscope

A Scanning Tunneling Microscope Capable of Imaging Specified Micron-Scale Small Samples