Abstract:The atomic force microscope (AFM) can be used in dynamic tipping mode as an effective lithography technique capable of manufacturing nanometer sized devices on the surface of a silicon wafer with a higher resolution surface characterization. The most difficult challenge in fabrication of nanostructure based on AFM nano-oxidation approach is the way of controlling an electric field between a cantilever probe tip and a silicon wafer. A water bridge builds up between the tip and the wafer, resulting in the oxidation due to the high electric field in the region. A reconstructive AFM system for nano-oxidation with a tapping model, implemented in an air, was developed. The presented AFM implements the increasing of electric field intensity by analyzing the impact voltage from −1 V to −5 V, electric field, and ion concentrations at the ambient/oxide and oxide/silicon interfaces, while the growth of thin oxides assumes a single liquid/silicon interface, which is modeled as an infinitely long conducting plane. Therefore, particle distribution for the surface charge density is generated for topography simulations. Based on the control-parameters, an enhanced electrical field of up to 1010 V/m can be obtained, which provides a powerful support for controllable experimental study of nanostructures fabrication with AFM tip induced local anodic oxidation. This showed the dependence of applied voltage types and various nanostructures and life time of AFM tip, by controlling tip-sample position in nanolithography processes is an important factor for controlling the aspect electric field distribution. And the effect of different parameters on enhancement distribution was performed and analyzed in this paper.

Local Oxidation of Titanium Thin Films Using an Atomic Force Microscope under Static and Pulsed Voltages

Improving the Resolution and the Uniformity of AFM Tip Induced Oxide Patterns with Pulsed Voltages

Effect of Oxidation Time on the Structure and Properties of Ti-25Nb-3Zr-2Sn-3Mo Titanium Alloy Microarc Oxide Film Layer

Fabrication of Nanostructures on the Surface of Titanium Film Using SPM Nanolithograpy Technique

Effect of the tip-sample contact force on the nanostructure size fabricated by local oxidation nanolithography.

Preparation of Micro/Nanostructures by AFM Field-induced Oxidation

Study on Nanofabrication with Dynamic Electrical-Field-induced Anodic Oxidation

3-D finite element calculation of electric field enhancement for nanostructures fabrication mechanism on silicon surface with AFM tip induced local anodic oxidation

Nanolithography by non-contact AFM induced local oxidation : Fabrication of tunneling barriers suitable for single electron devices

Mechanical Writing of N-Type Conductive Layers on the SrTiO3 Surface in Nanoscale

AFM local oxidation nanolithography of graphene

Surface Roughness And Hydrophilicity Of Titanium After Anodic Oxidation

Impact of Various Parameters on Nanostructures Fabrication Mechanism on Silicon Surface with AFM Tip Induced Local Anodic Oxidation

Porous Films on Surface of Titanium Prepared by Low Voltage Micro Arc Oxidation

Tunable Growth of TiO2 Nanostructures on Ti Substrates

Effect of cathode voltage on structure of micro-arc oxidation films of pure titanium

Compositional and Structural Evolution of the Titanium Dioxide Formation by Thermal Oxidation

Nano-Scale Sample-Plate Fabrication By Afm-Tip Induced Local Oxidation

Preparation and Properties of Titanium Oxide Thin Film by Midfrequency Alternative Reactive Magnetron Sputtering Technique

Effects of Electrical Parameters on Micro-Arc Oxidation Coatings on Pure Titanium

Fabrication of Titanium Oxide Nanotube Arrays by Anodic Oxidation