The Analysis of the Dynamic Performance of the Probe in Contact Measurement

段广云,王建华,李平
DOI: https://doi.org/10.3969/j.issn.1673-9965.2004.01.004
2004-01-01
Abstract:With measurement speed increasing, the dynamic performance of the probe becomes an important factor which influences measurement precision. In this paper the model of instrument for micro-displacement test was simplified, and the detachment of probe and the work piece during contact scanning measurement was thoroughly analyzed, then the theoretical correlation between the vibration frequency of work piece and the inherent frequency of probe was also given when the work piece and the probe are separated with each other. In the meantime the factors influencing the theoretical detachment point were also analyzed, which has great dependence on improving the static and dynamic response performance of the probe.
What problem does this paper attempt to address?