Abstract:A laser‐based solution to produce highly‐controllable arrays of deep nanoholes at the surface of dielectric materials is reported. Dedicated shaping of a short‐pulse laser beam is exploited to process dense square arrays of holes with diameters down to 200 nm and depths in the range 3–20 μm. This opens perspectives for manufacturing integrated devices using this cost‐effective alternative nanofabrication method. Periodic nanohole arrangements constitute an important building block of advanced photonic devices. Aside from standard nanofabrication tools, a direct laser‐based approach is introduced here, that enables single‐step and point‐by‐point machining of arrays of holes with subwavelength diameters and depths reaching several micrometers at the surface of fused silica. The method relies on a simple optical arrangement including an axicon combined with an amplitude mask to shape the laser intensity in appropriately truncated micro‐Bessel beams of adjustable length. The suitability and limitations of the technique are investigated to fabricate arrays of cylindrical nanoholes with tunable depths. In particular, the challenge of avoiding crosstalk effects during the laser‐writing process of high‐density arrays is explored. The achievability of square arrays of nanoholes at the surface of fused silica, with diameters down to 200 nm and variable depths from 3 to 20 μm at a spatial density defined by a pitch of 1.5 μm is demonstrated. The performance level shows the potential of the direct‐laser‐processing method towards the realization of integrated devices, offering a highly flexible and cost‐effective alternative technique to current nanofabrication methods.

Hole Drilling of Silica Glass with Infrared Femtosecond Laser Pulses

Laser Micro-Hole Drilling of Soda-Lime Glass with Femtosecond Pulses

Ultrafast and precision drilling of glass by selective absorption of fiber-laser pulse into femtosecond-laser-induced filament

Water-assisted Drilling of Microfluidic Chambers Inside Silica Glass with Femtosecond Laser Pulses

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Simultaneous Multi-Microhole Drilling of Soda-Lime Glass by Water-Assisted Ablation with Femtosecond Laser Pulses

Generation of Debris in Water-Assisted Femtosecond Laser Drilling of Silica Glass

Three-Dimensional Microdrilling of Glass by Multiphoton Process and Chemical Etching

Bessel Beam Femtosecond Laser Interaction with Fused Silica Before and After Chemical Etching: Comparison of Single Pulse, MHz-Burst, and GHz-Burst

Femtosecond laser micromachining and microfabrication in transparent materials

Femtosecond laser microfabrication of micro-optic elements in glass

Liquid-Assisted Femtosecond Laser Precision-Machining of Silica.

Ultrafast Laser Drilling of Crack-free, Debris-free and Heat Affected Zone (Haz)-Free Blind Holes in Al2O3 with Flat Bottom and Reduced Taper Angles

Femtosecond pulsed laser micro-machining of glass substrates with application to microfluidic devices

Percussion drilling in glasses and process dynamics with femtosecond laser GHz-bursts

Engraving Depth‐Controlled Nanohole Arrays on Fused Silica by Direct Short‐Pulse Laser Ablation

High quality full ablation cutting and stealth dicing of silica glass using picosecond laser Bessel beam with burst mode

Mechanisms of damage formation in glass in the process of femtosecond laser drilling

Study on 532nm and CO2 laser processing of fused silica glass

High-quality Rapid Laser Drilling of Transparent Hard Materials

Femtosecond Laser Induced Defects in Various Silica Glasses