Abstract:Fused silica is widely used in aerospace and precision integrated micro-optical sensors due to its high hardness, low coefficient of thermal expansion, high transmittance properties and high chemical stability in harsh environments. Due to the amorphous characteristics, fused silica wet etching is isotropic and cannot realize specific structural functional devices; dry etching process is complex, costly, and relatively low productivity. These characteristics make the processing of fused silica extremely difficult, with high cost and low yield. Femtosecond laser processing has been widely used in the processing of complex and fine three-dimensional structure of fused silica due to its wide adaptability of materials, high degree of processing fineness and non-mask processing technology, but the surface of the processed surface is relatively rough. Fine micro-optical devices can be realized by wet-assisted femtosecond laser processing. In this study, microstructural patterns were fabricated on fused silica using a tightly focused femtosecond laser by means of a self-developed ultrafast laser processing instrumentation. By controlling the laser processing parameters and the etching time of HF solution to realize the precise modulation of linewidth, period and height of the grating, one/two dimensional gratings, and the Fresnel zone plates with circular and elliptical focal points and the biomimetic compound eye microlens array were successfully fabricated. Finally, the performance of the fabricated optical components were characterized, which were comparable to theoretical simulation values. The results show that the total diffraction efficiency of the fused silica gratings fabricated using this method reaches 85.5%; the Fresnel zone plates and the bionic compound eye microlens array have good focusing effects. This study provides a reference method for the fine micromachining of hard materials such as fused silica, and provides a theoretical basis for its engineering application.

Study on 532nm and CO2 laser processing of fused silica glass

New Progress of CO2 Laser Processing Techniquesfor Fused Silica Optics

Material migration and damage characteristics of fused silica optical surface treated by CO 2 laser/short – pulse ultraviolet laser

Research on Laser-Assisted Micro-Milling of Fused Silica

Investigation on the influence of the CO2 laser parameters on the defect healing process of fused silica

Toward Little Heat-Affected Area of Fused Silica Materials Using Short Pulse and High Power CO2 Laser

Research of Femtosecond Laser-Assisted Etching of Fused Silica Micro-Optics Devices

Irradiation Effects of CO2laser Parameters on Surface Morphology of Fused Silica

Study on the Absorption Characteristics and Laser Damage Properties of Fused Silica Optics under Flexible Polishing and Shallow DCE Process

The Influence of Laser Beam Shaping on Surface Roughness, Surface Figure and Mid-Spatial Frequency of Fused Silica Glass in CO2 Laser Smoothing

CO2 and CO laser comparison of glass and ceramic processing

Coupled Thermal-Mechanical Analysis of CO<sub>2</sub> Laser Irradiation on Fused Silica

Microstructuring with Femtosecond Laser Inside Silica Glasses

Formation Mechanism of Surface Morphology in the Process of CO2 Pulsed Laser Processing of Fused Silica Optics

Experimental study on direct fabrication of micro channel on fused silica by picosecond laser

Rapid CO2 Laser Processing Technique for Fabrication of Micro-Optics and Micro-Structures on Fused Silica Materials

Study on Processing Parameters of Glass Cutting by Nanosecond 532 Nm Fiber Laser

Experimental Investigation on Laser In-Situ Assisted Ultra-Precision Cutting of Fused Silica

Investigation on Femtosecond Laser-Assisted Microfabrication in Silica Glasses

Research Development of CO2 Laser Treatment for Repair Damage in Fused Silica

Fabrication of Microchannels on Silica Glass by Femtosecond Laser Multi-Scan： from Surface Generation Mechanism to Morphology Control