Abstract:Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows multiphoton absorption to be induced in materials that are transparent to the laser wavelength. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials provides a facile route to modify the interior of transparent materials in a spatially selective manner, enabling three-dimensional (3D) fabrication and integration of multifunctional micro-/nano-structures and components in a monolithic substrate. For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers, microvalves, and micropumps. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials. By virtue of its unique ability to build different types of functional components into a monolithic substrate, femtosecond laser direct writing offers a flexible approach to fabricate a wide variety of integrated devices and microsystems. Although femtosecond laser micromachining have indeed shown extreme flexibility for fabrication and integration of 3D multifunctional micro- components in bulk transparent materials, several major issues still exist, such as the limited size of the microfluidic structures, the limited fabrication resolution, high surface roughness, and so on. This review focuses primarily on the recent efforts to tackle the two issues as mentioned above. By use of femtosecond laser direct writing in porous glass immersed in water followed by post-annealing, we demonstrated microfluidic channels with nearly unlimited lengths and arbitrary 3D geometries. By controlling the laser peak intensity and polarization, a single nanoplane with sub-50-nm feature size could be achieved inside porous glass based on these strategies, several functional devices and their applications have been demonstrated, including 3D passive microfluidic mixer and an integrated micro-nanofluidic system for single DNA analysis. Furthermore, we demonstrate fabrication of 3D whispering gallery microcavities with quality (Q)-factors on the level of ~1×106 in glass chips by femtosecond laser direct writing followed by CO2 laser reflow.

Fabrication of millimeter-scale deep microchannels in fused silica by femtosecond laser filamentation effect

Ultra-high-Q Microcavities Fabricated on Fused Silica Chips by Three-Dimensional Femtosecond Laser Microfabrication

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Femtosecond Laser Direct Writing of High-Q Microresonators in Glass and Crystals

Fabrication of fluidic submicron-channels by pulsed laser-induced buckling of SiOx films on fused silica

Femtosecond Laser Fabrication of Microchannels in Transparent Hard Materials

Fabrication of microchannels by space-selective control of phase separation in glass.

Experimental Research on CO_2 Laser Direct-writing Machining PMMA Microchannel

Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing

Influence of Focusing Depth on the Microfabrication of Waveguides Inside Silica Glass by Femtosecond Laser Direct Writing

Water-assisted Drilling of Microfluidic Chambers Inside Silica Glass with Femtosecond Laser Pulses

Femtosecond laser modification combined with chemical etching to achieve high-quality cutting of millimeter-thick fused silica

Fabrication of beam shapers in the bulk of fused silica by femtosecond laser pulses.

Micro-Fabrication and Monitoring of Three-Dimensional Microstructures Based on Laser-Induced Thermoplastic Formation

Ultrafast laser direct drilling of high aspect ratio microchannels in fused silica: Insights on channel self-termination mechanisms

Laser-Induced Bubble Dynamics Optimization for High-Aspect-Ratio 3D Micro-Fluidic Channels Fabrication

Low-loss optofluidic waveguides in fused silica enabled by spatially shaped femtosecond laser assisted etching combined with carbon dioxide laser irradiation

Formation of diversiform microstructures in wide-bandgap materials by tight-focusing femtosecond laser pulses

Research on hole depth in femtosecond laser deep micropore processing technology based on filament effect

Fabrication of High Refractive Index-Modulation Structures in Fused Silica by Femtosecond Laser Pulses