Abstract:Femtosecond (fs) laser microfabrication has been gathering more research interests due to its ability to create micro- and sub-micrometer 3D structures. An extremely high light intensity enables multiphoton absorption in transparent materials, upon which the spatial resolution of fabricated elements is confined to the sizes even smaller than optical diffraction limit. Our report will formulate the principles of the laser microfabrication of such applications. A direct application of single-shot pulse-induced optical damage is a 3D optical memory with a storage density of ca. 100 Gbits/cm2 in silica. Photonic and optoelectronic applications such as optical gratings, 3D inlayed-'atom'- like and 2D cylinder-consisted photonic crystals have been fabricated in silica. Also, photopolymerization of photoresist by a scanning of focal point of laser irradiation solidifies submicrometer rods, which forms photonic lattices when packed into well-defined 3D pattern. Photonic bandgap effects of above-mentioned structures were corroborated by IR Fourier spectroscopy and numerical simulations, by which the success of laser microfabrication was evidenced. Self-focusing of fs-pulses is another possibility of the microstructuring of transparent materials, which is demonstrated in the case of silica. This could find its application in sub-diffraction-limited recording.

Formation of diversiform microstructures in wide-bandgap materials by tight-focusing femtosecond laser pulses

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Fabrication of quasi-periodic micro-voids in fused silica by single femtosecond laser pulse

Formation Mechanism Of Self-Organized Voids In Dielectrics Induced By Tightly Focused Femtosecond Laser Pulses

Micro-Fabrication By Femtosecond Laser Pulses

Recent Research Progress on Femtosecond Laser Induced Microstructures in Glasses

Photonic Lattices Achieved with High-Power Femtosecond Laser Microexplosion in Transparent Solid Materials

Microstructures induced in the bulk of SrTiO3 crystal by a femtosecond laser.

Microfabrication by Femtosecond Laser Irradiation

Fabrication of micro-optical components by using a femtosecond laser

Fabrication of beam shapers in the bulk of fused silica by femtosecond laser pulses.

Fundamental Microstructures Fabricated on FOTURAN Glass Using Femtosecond Laser

Self-assembled Three-Dimensional Periodic Micro-Nano Structures in Bulk Quartz Crystal Induced by Femtosecond Laser Pulses.

Femtosecond laser microfabrication of micro-optic elements in glass

Silicon micro-structuring using ultra-short laser pulses

Phenomena and mechanisms of single beam femtosecond laser induced periodic microstructures

Sub-diffraction-Limit Voids in Bulk Quartz Induced by Femtosecond Laser Pulses

Photonic Micro and Sub-Micro Structures in LiNbO3 Crystals

Fabrication of High Refractive Index-Modulation Structures in Fused Silica by Femtosecond Laser Pulses

Femtosecond laser 3D fabrication of whispering-gallery-mode microcavities