Experimental Research on CO_2 Laser Direct-writing Machining PMMA Microchannel

Xiang Hengfu,Fu Jianzhong
2009-01-01
Abstract:Laser direct-writing manufacturing polymer microfluidic chip is a new micromachining technology.In order to study the relationship between laser processing parameters and microchannel depth,experimental research on CO2 laser micromachining PMMA microchannel was carried out through a precision experimental table.The relationship among laser power,scanning velocity and machining passes and microchannel depth was obtained,and the interrelationship among microchannel length,microchannel depth and microchannel width was also studied.The experimental results indicates that the difference between the theoretical data and the experimental data is only about 6 μm when the laser power is 15 W-35 W and the scanning velocity is 0.2 m/s~0.45 m/s.
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