Generation of Debris in Water-Assisted Femtosecond Laser Drilling of Silica Glass

Y Iga,W Watanabe,YD Li,L Yan,J Nishii,K Itoh
DOI: https://doi.org/10.1143/jjap.44.8013
IF: 1.5
2005-01-01
Japanese Journal of Applied Physics
Abstract:We report on the generation of debris in the femtosecond laser drilling of silica glass in water. The morphology of the debris ejected from the amorphous synthesized silica is examined by scanning electron microscopy and the chemical structures are investigated by X-ray diffraction analysis and Fourier transform infrared spectroscopy.
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