Preparation of Single-Phase Ti2AlN Coating by Magnetron Sputtering with Cost-Efficient Hot-Pressed Ti-Al-N Targets

Yueming Li,Guorui Zhao,Hong Qi,Meishuan Li,Yufeng Zheng,Yuhai Qian,Liyuan Sheng

DOI: https://doi.org/10.1016/j.ceramint.2018.06.055

IF: 5.532

2018-01-01

Ceramics International

Abstract:In the present research, single-phase Ti2AlN coatings were prepared on polycrystalline Al2O3 from cost-efficient hot-pressed Ti-Al-N targets by D.C. magnetron sputtering and subsequent annealing treatment. SEM, TEM and XRD analyses were performed to characterize the microstructure and phase constituents of the Ti-Al-N target and coating. The results reveal that phase constituents of hot-pressed Ti-Al-N targets were affected by the synthesis temperature. When the synthesis temperature was 700 degrees C, the target mainly comprised alpha-Ti, TiN and Ti-Al intermetallics. While in the target synthesized at 900 degrees C, TiN, Ti-Al intermetallics and Ti2AlN were the main phase constituents. The as-deposited coatings from both targets exhibited typical amorphous crystal structure. Crystallization of the coating initiated between 500 degrees C and 600 degrees C. After annealing at 700 degrees C for 1 h, the amorphous coating was transformed to single-phase polycrystalline Ti2AlN coating. In general, single-phase Ti2AlN coatings could be obtained from the target whether with Ti2AlN or not. It was the element ratio of Ti:Al:N = 2:1:1 (at%) rather than the phase contents in the targets that was critical to fabricate single-phase Ti(2)AIN coating.