Abstract:High entropy alloy nitride coatings (HEAN), showing superior mechanical strength, high oxidation resistance, and thermal stability, have often been used in protective hard coatings field. However, the high temperature tribological field of novel HEA nitride films has not yet been well studied. The correlations among tribological properties, compressive residual stress, mechanical properties, and self-lubricating oxide are still limited.In this research, the novel (AlCrNbSiTiMo)N coatings were fabricated on both Inconel-718 and Si (100) substrate by radio frequency (RF) magnetron sputtering via tuning both substrate bias at 300 °C deposition temperature. The (AlCrNbSiTiMo)N coatings with a specific substrate bias exhibit an outstanding hardness of 34.5±0.8 GPa.In the wear test at 700 °C, the films deposited at −100 V revealed the lowest wear rate around 1.2 × 10−6 mm3N−1 m−1. With Molybdenum doping, the MoO3 Magnéli phase was observed on the surface at elevated temperature wearing process, and the friction coefficient at high temperature decreased significantly due to a lubricating surface. The coating exhibited the average friction coefficient value of 0.48 in the wear test of 700 °C. The high temperature tribological performance was addressed and related to the mechanical properties, the plastic deformation resistance H3/E2, and the excess residual stress of the films.This study provides a new design for hard coatings applied to severe wearing conditions. By tuning substrate bias, the (AlCrNbSiTiMo)N coatings exhibit outstanding mechanical and tribological characteristics, which will be a promising candidate for high temperature tribological protective film.

Mechanical and Tribological Properties of Multi-Element (alcrtatizr)n Coatings

Structural and Mechanical Properties of Multi-Element (alcrmotatizr)nx Coatings by Reactive Magnetron Sputtering

Effect of Nitrogen Protective Atmosphere on Microstructure and High Temperature Erosion Property of TiAl3 and Cr3C2 Composite Coatings

Effects of Substrate Temperature and Post-Annealing on Microstructure and Properties of (alcrnbsitiv)n Coatings

Thermal and Thermo-Mechanical Properties of Ti–Al–N and Cr–Al–N Coatings

Effect of Substrate Bias on the Structure and Properties of Multi-Element (alcrtatizr)n Coatings

Mechanical performance and nanoindenting deformation of (AlCrTaTiZr)NCy multi-component coatings co-sputtered with bias

Effects of annealing temperature on the microstructure, mechanical and tribological properties of CrAlTiN coatings

Structural evolution and high-temperature tribological properties of AlCrON coatings deposited by multi-arc ion plating

Influence of the Addition of the Elements Ti and Cr on the Structure, and Mechanical and Tribological Properties of AlSiN Coatings

Mechanical Properties of the TiAlSiN Coatings by Post Heat Treatments

Influence of substrate bias, deposition temperature and post-deposition annealing on the structure and properties of multi-principal-component (AlCrMoSiTi)N coatings

Mechanical, Tribological, and Corrosion Resistance Properties of (TiAlxCrNbY)Ny High-Entropy Coatings Synthesized Through Hybrid Reactive Magnetron Sputtering

Improvement of high entropy alloy nitride coatings (AlCrNbSiTiMo)N on mechanical and high temperature tribological properties by tuning substrate bias

Microstructure and Tribological Behavior of TiAlSiN Coatings Deposited by Deep Oscillation Magnetron Sputtering

Structure and Tribological Properties of CrTiAlCN Coatings with Various Carbon Contents

Microstructure and tribological performance of (AlCrWTiMo)N film controlled by substrate temperature

Research on high temperature wear resistance mechanism of CrN/CrAlN multilayer coatings

Fabrication of amorphous AlMo 0.5 NbTa 0.5 TiZr RHEA coatings and the impact of deposition temperature on microstructure and properties

Effect of nitrogen flow rate on the microstructure, mechanical and tribological properties of CrAlTiN coatings prepared by arc ion plating

Einfluss von Sc, Y, Ti, Zr, Hf, V, Nb und Ta auf strukturelle und mechanische Eigenschaften von Cr-Al-N-Schichten