Mechanical Properties of the TiAlSiN Coatings by Post Heat Treatments

Wei-Yu Ho,Chin-Wei Chen,Li-Wei Shen,Chi-Lung Chang,Chun-Nane Chen,Chi-Chun Hwang
DOI: https://doi.org/10.1007/978-3-642-03653-8_245
2009-01-01
Abstract:In this study, TiAlSiN coatings were deposited by cathodic arc evaporation from titanium, aluminum and silicon alloy targets in a reactive nitrogen atmosphere at substrate bias of -50 V. The as-deposited coatings were then subjected to post heat treatment at 400 degrees C in nitrogen atmosphere. The annealing treatment has an expected effect on the wear resistance. The TiAlSiN coating subjected to heat treatment in nitrogen atmosphere presented wear resistance better than the as-deposited coatings. The friction coefficient of the TiAlSiN coatings subjected at 400 degrees C in nitrogen atmosphere was decreased due to the effect of the structure modification.
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