Influence of Target Current on Microstructures and Stoichiometries of TiAlN Coating Deposited by Arc Ion Plating

Wang Shaopeng,Pan Xiaolong,Li Zhengxian,Wang Baoyun,Yan Peng,Ji Shouchang
DOI: https://doi.org/10.13922/j.cnki.cjovst.2008.s1.003
2008-01-01
Abstract:The TiAlN coating was deposited by arc ion plating(AIP)of high purity Ti and Al targets on TA2(pure titanium)and TC11 titanium alloy(Ti-6.5Al-3.5Mo-1.5Zr-0.3Si)substrates.The surface morphology and chemical compositions of the coating were characterized with energy dispersive spectroscopy(EDS)and scanning electron microscopy(SEM).The results show that the type of substrate considerably affect the surface morphologies and the stoichiometry gradients of Ti,Al,and N.The inter-diffusion of the Ti,Al and N across the interface can be definitely observed,which results in the strong adhesion at the interface of the fairly compact,smooth coating and the substrate.
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