The Effect of Al Element on the Microstructure of Ti1-xAlxN Coating

王永康,熊仁章,雷廷权,夏立芳,李炳生
DOI: https://doi.org/10.3969/j.issn.1001-5132.2001.04.008
2001-01-01
Abstract:Ti 1-x Al xN coating are deposited by multiarcion plating method with cast Ti-Al alloy and hot-press-sintered Ti-Al alloy used as the targets. The microstructure of the coating and the mechanism were studied by SEM?XRD and XTEM. The results show that the TiAlN coating has a polycrystalline columnar structure, it is mainly composed of (Ti,Al)N; The raise of Al element would decrease the formation and the lattice constant of (Ti,Al)N.
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