A simple and efficient technique of interlayer interface Ar + etching to enhance tribological properties in TiSiN/TiAlN coating

Jialin Li,Ling Gong,Yubing Lin,Zhijun Xie,Lei He,Xiangli Zhong,Hongjia Song,Jinbin Wang
DOI: https://doi.org/10.1016/j.triboint.2024.109813
IF: 5.62
2024-05-26
Tribology International
Abstract:In this paper, a simple and efficient technique of interlayer interface Ar + etching is presented to regulate the microstructure and properties of the TiSiN/TiAlN coating deposited by arc ion plating. SEM, AFM, XRD, and EIS of the TiAlN coating indicate that Ar + bombardment can reduce the roughness and porosity density. HR-TEM reveals the presence of epitaxial growth at the interlayer interface. The TiSiN/TiAlN coating exhibits high bonding force ( L c3 around 118.7 N) and excellent toughness (CPR s around 2230.2 N 2 ) at − 300 V etching. The wear rate and COF of the coating are reduced to 4.26 × 10 −5 mm 3 ∙N −1 ∙m −1 and 0.295. The results demonstrate that interlayer interface Ar + etching can effectively optimize the interlayer quality and enhance the wear resistance of the multilayer coating.
engineering, mechanical
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