Atomic Layer-Deposited Al2O3 Interlayer for Improved Tribological and Anti-corrosion Properties of TiN Hard Coating on 316L Stainless Steel

Ji-Zhou Kong,Liang Yin,Yan Xuan,Ai-Dong Li,Qian-Zhi Wang,Fei Zhou
DOI: https://doi.org/10.1007/s11665-019-04427-y
IF: 2.3
2019-11-01
Journal of Materials Engineering and Performance
Abstract:A dense Al<sub>2</sub>O<sub>3</sub> interlayer was inserted into TiN to enhance the tribological and anti-corrosion properties of TiN hard coating via a hybrid process of magnetron sputtering and atomic layer deposition (ALD). The influence of the ALD-Al<sub>2</sub>O<sub>3</sub> layer on the microstructure, mechanical, tribological and anti-corrosion properties of TiN was examined. The TiN-Al<sub>2</sub>O<sub>3</sub> coating exhibits low friction coefficient and specific wear rate, due to the structure change and columnar refinement caused by the addition of amorphous ALD-Al<sub>2</sub>O<sub>3</sub> interlay which improves the mechanical properties of hard coating. The improved corrosion properties of TiN are attributed to the fact that the insulating ALD-Al<sub>2</sub>O<sub>3</sub> used as a sealing layer can prevent the corrosive chlorine ions migrating into the lower TiN layer and block the charge transport in coatings. Moreover, raising the insertion position of ALD-Al<sub>2</sub>O<sub>3</sub> layer away from the steel substrate results in a further increase in the anti-corrosion property of TiN-Al<sub>2</sub>O<sub>3</sub> composite coating.
materials science, multidisciplinary
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