Room Temperature Fabrication of High Quality ZrO2Dielectric Films for High Performance Flexible Organic Transistor Applications

Yanfen Gong,Kai Zhao,Longsen Yan,Weiyao Wei,Cheng Yang,Honglong Ning,Sujuan Wu,Jinwei Gao,Guofu Zhou,Xubing Lu,J. -M. Liu
DOI: https://doi.org/10.1109/led.2017.2783945
IF: 4.8157
2018-01-01
IEEE Electron Device Letters
Abstract:By using low-cost solution process and ultraviolet (UV) irradiation, we successfully fabricated high-quality ZrO2 films at room temperature. The ZrO2 films obtained with 1-h UV curing showed a very low leakage current (1.7 x 10(-6) A/cm(2) at -3 V), a high breakdown electric field 7.9 MV/cm, a high bandgap (6.13 eV), and a high dielectric constant (17.8). The organic thin-film transistor made by solution-processed ZrO2 gate dielectric shows a greatly reduced operation voltage of 4 V, and a high drain current on/off ratio of 3.1 x 106. Furthermore, we also clarified the electronic structures of ZrO2 films with UV curedor thermal annealing. This letter demonstrated that solution-processable ZrO2 film is promising for applications in future low power consumption electronic devices.
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