Solution Processable High Quality ZrO2 Dielectric Films for Low Operation Voltage and Flexible Organic Thin Film Transistor Applications

Yanfen Gong,Kai Zhao,Huixin He,Wei Cai,Naiwei Tang,Honglong Ning,Sujuan Wu,Jinwei Gao,Guofu Zhou,Xubing Lu,J-M Liu
DOI: https://doi.org/10.1088/1361-6463/aaac1b
2018-01-01
Abstract:Low temperature fabrication of high quality dielectric films for high performance flexible electronics is still a big challenge. In this work, we realized low temperature fabrication of high quality amorphous ZrO2 dielectric films via a low-cost solution process. The microstructure and electrical properties, as well as the electronic structures of solution processed ZrO2 films have been investigated systematically. The ZrO2 films with 160 °C annealed showed a low leakage current (3.6  ×  10−5 A cm−2 at  −3 V) and a high band gap (5.4 eV). The flexible organic thin film transistor (OTFT) made by using the solution-processed amorphous ZrO2 dielectric shows a low operation voltage of 4 V and a high drain current on/off ratio of 2.4  ×  105. The frequency response of the ZrO2-OTFT device is up to 51.8 KHz under a low gate voltage of  −3 V. Our work demonstrated that a solution processable ZrO2 film is promising for applications in future low power consumption and wearable flexible electronic devices.
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