Effect of Deposition Pressure on the Structural and Optical Properties of Ga2O3films Obtained by Thermal Post-Crystallization

Yikai Liao,Shujie Jiao,Shaofang Li,Jinzhong Wang,Dongbo Wang,Shiyong Gao,Qingjiang Yu,Hongtao Li
DOI: https://doi.org/10.1039/c7ce01567d
IF: 3.756
2018-01-01
CrystEngComm
Abstract:β-Ga2O3films have been obtained by thermal annealing of amorphous thin films that were deposited by radio frequency magnetron sputtering.
What problem does this paper attempt to address?