Three-dimensional Fin-Shaped Dual-Gate Photosenstive A-Si:H Thin-Film Transistor for Low Dose X-ray Imaging

Hai Ou,Shaozhi Deng,Ningsheng Xu,Jun Chen,Kai Wang
DOI: https://doi.org/10.1109/cad-tft.2016.7785058
2016-01-01
Abstract:This work reports on a novel dual-gate photosensitive amorphous silicon (a-Si:H) thin-film transistor (TFT) for low-level light detection. To enhance carrier collection and light absorption while maintaining decent switching performance, a three-dimensional (3D) fin-shaped channel is designed and verified. As a result of field strengthening particularly nearby the contact regions, the sensitivity parameter γDark=–0.84 is obtained. Hence, the device tends to have a wider dynamic range compared with the previous Pi-shaped and planar structures [1, 2]. The TFT is very sensitive to the light of 550 nm and, making it a sound promise for low-dose indirect-conversion X-ray imaging.
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