Abstract:Creating monolithic silicon/perovskite structures is a promising approach to engage emerging perovskite materials with silicon circuitry, which is essential to achieve industry-scale applications such as high performance X-ray detection. In particular, to achieve pixelated perovskite is a key step to address the issue of electrical crosstalk and low spatial resolution in imaging caused by inefficient migration and collection of carriers in the direction of signal collection. However, with the existing top-down methods, the thickness of patterned perovskite is limited to be in submicron level, which is far from highly efficient absorption of X-ray energy, further compromising the detection sensitivity. Here, we successfully demonstrate 3D hybrid perovskite crystal arrays with the thickness of ~300 μm on pixelated silicon substrate (forming co-axial silicon/perovskite heterojunction arrays) by melting PbBr2 and in situ chemical vapor conversion. Both morphological and optical properties of the resulting heterojunction arrays are systematically investigated. Furthermore, we demonstrate a high performance direct-conversion flat panel X-ray detector which exhibits high sensitivity of 242 μC Gyair−1 cm−2 that is much higher than the commercially available α-Se, and fast response speed (rising and falling time are 0.5 ms and 1.3 ms, respectively). The proposed strategy addresses the trade-off problem between the high sensitivity (requiring ~ mm-thickness perovskite crystal) and high spatial resolution (patterning of perovskite crystal) to achieve high-performance X-ray detection. This work not only offers a new pathway to fabricate pixelated μm-thick perovskite-based X-ray detectors, but also impacts on the application and functionalization of perovskite materials in silicon circuitry.

X-ray Sensor Based on Pixelated Scintillation Film on Photodiode Arrays

Double Junction Photodiode for X-Ray Cmos Sensor Ic

Pixellated Perovskite Photodiode on IGZO Thin Film Transistor Backplane for Low Dose Indirect X-Ray Detection

Flexible, active-matrix flat-panel image sensor for low dose X-ray detection enabled by integration of perovskite photodiode and oxide thin film transistor

Pixelated liquid perovskite array for high-sensitivity and high-resolution X-ray imaging scintillation screens

Chromatic X-Ray imaging with a fine pitch CdTe sensor coupled to a large area photon counting pixel ASIC

X-ray Sensitive Hybrid Organic Photodetectors with Embedded CsPbBr3 Perovskite Quantum Dots

Backside Illuminated 3-D Photosensitive Thin-Film Transistor on a Scintillating Glass Substrate for Indirect-Conversion X-Ray Detection

Ultrasensitive and Robust 120 keV Hard X‐Ray Imaging Detector based on Mixed‐Halide Perovskite CsPbBr 3− n I n Single Crystals

Dual-gate photo thin-film transistor: a “smart” pixel for high- resolution and low-dose X-ray imaging

Nanosecond and Highly Sensitive Scintillator Based on All-Inorganic Perovskite Single Crystals

Oriented-Structured CsCu2I3 Film by Close-Space Sublimation and Nanoscale Seed Screening for High-Resolution X-ray Imaging

Colloidal PbS Quantum Dot Photodiode Imager with Suppressed Dark Current

Highly sensitive SWIR photodetector using carbon nanotube thin film transistor gated by quantum dots heterojunction

Development of a Pixel Readout ASIC for CZT Detectors for Spectral X-ray Photon-Counting Imaging Applications

Lead halide perovskite quantum dots based liquid scintillator for x-ray detection

Ultraviolet Color Image Sensor Based on CsPbBr3 Inorganic Perovskite Nanocrystal Film.

Encapsulated X-Ray Detector Enabled by All-Inorganic Lead-Free Perovskite Film With High Sensitivity and Low Detection Limit

Low‐Cost and Large‐Area Hybrid X‐Ray Detectors Combining Direct Perovskite Semiconductor and Indirect Scintillator

All-inorganic perovskite nanocrystal scintillators

Co-axial silicon/perovskite heterojunction arrays for high-performance direct-conversion pixelated X-ray detectors