Fabrication and Characterization of Gated ZnO Nanowire Field Electron Emitters

Laitang Luo,Juncong She,Shaozhi Deng,Jun Chen,Ningsheng Xu
DOI: https://doi.org/10.1109/ivnc.2016.7551526
2016-01-01
Abstract:Nanofabrication procedure was developed to obtain uniform zinc oxide (ZnO) nanowire arrays. The geometric uniformity of the nanowire and the surface smoothness were improved by optimizing the fabrication processes. Array of gated ZnO nano-emitter was fabricated to realize the low driving voltage triode structure.
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