Abstract:In recent years, large strides have been achieved in understanding nucleation and growth of chemical vapour deposition diamond, but there is still not a good method of how to determine the adhesive strength, residual stress and elastic modulus of diamond thin films accurately. The blister test method which can obtain adhesive strength, elastic modulus and residual stress of thin films in a single test is very economical and practical, so it has expansive foreground in quantitative evaluation mechanical properties of thin films. By means of electron enhanced hot filament chemical vapour deposition, diamond films were deposited on silicon slice (100), and a free standing window sample of diamond thin films was fabricated by means of photolithography and anisotropic wet etching in this research. Using a self-designed bulge equipment, the membrane bulge height under differential pressure was measured by laser interferometry system, and then fitted by least squares procedure, the elastic modulus, residual stress and adhesive strength of diamond thin films were obtained. The apparatus of blister test is available readily and is not limited by the shape of substrate, so it can measure the mechanical properties of diamond coated tool with complicated shape, and it has provided an effective means for precisely measuring the mechanical properties of other thin films.

In-situ Reflectivity Measurement in the Fabrication of Diamond X-ray Windows

Study on the growth of CVD diamond thin films by in situ reflectivity measurement

A Near-Infrared Diamond Anti-Reflective Filter Window

A Diamond Near Infrared Antireflective Filter Window and Its Application

Cvd Diamond Thin Film For Ir Optics And X-Ray Optics

Structural and optical characterizations of nanostructured diamond films grown on Si(001) substrates

Highly Transparent Nanocrystalline Diamond Films On Quartz Substrates

Smooth Thin-Film C/Diamond Membranes With Controllable Optical Band-Gaps

Measurement of the Reflection Curve of Crystals Used in the Monochromator of X-ray Diffraction Beamline at NSRL

Efficient fabrication of infrared antireflective microstructures on a curved Diamond-ZnS composite surface by using femtosecond Bessel-like beams

Investigation and Batch Fabrication of G-Band Broad Band and Low Loss Monocrystalline Diamond Window for Vacuum Electron Devices

Growth of Diamond Thin Films with Smooth Surface and High Transmittance on Quartz Glass Substrates

X Ray Diffraction With A Double Hot-Plate Laser-Heated Diamond Cell

Improvement in the Electrical Properties of Diamond Films for Radiation Dosimeter

Fabrication, microstructure and optical properties of 〈110〉 textured CVD polycrystalline diamond infrared materials

Diffraction imaging for in-situ characterization of double-crystal x-ray monochromators

Diamond sensors for hard X-ray energy and position resolving measurements at the European XFEL

Measurement of integral diffraction coefficients of crystals on beamline 4B7 of Beijing Synchrotron Radiation Facility

Performance Improvement of Graphenic Carbon X-ray Transmission Windows

Mechanical properties of diamond thin films quantitative measured by means of blister test

Femtosecond Laser Ablation for Manufacturing of X-ray Lenses and Phase Corrector Plates