Investigation and Batch Fabrication of G-Band Broad Band and Low Loss Monocrystalline Diamond Window for Vacuum Electron Devices

Guo Guo,Guokai Zhang,Chong Guo,Zhihua Xing,Jing Zeng,Yanyu Wei
DOI: https://doi.org/10.1109/led.2024.3441650
IF: 4.8157
2024-10-04
IEEE Electron Device Letters
Abstract:The batch fabrication of G-band broad band and low loss pill-box window with monocrystalline diamond (MD) is introduced in this letter. Design and thermal simulations demonstrate advantages over sapphire, including the broader frequency band and the greater heat dissipation capacity. Following chemical vapor deposition (CVD) production, the surface roughness and the thickness deviation of the MD sheets are effectively controlled within 0.5nm and m by polishing technology, respectively. Tiny ring regions on the sheet are metallized using the Ti-Mo-Ni magnetron sputtering technology, followed by vacuum brazing. Test results for batch fabrication show a 90% yield with a vacuum leak rate of less than Pa m3/s and a 10% (20GHz) relative bandwidth with dB and dB simultaneously. The MD window products indicate significant potential for applications in broad-band and high-power terahertz vacuum electron devices.
engineering, electrical & electronic
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