Abstract:Due to the large thermal and lattice mismatch between gallium oxide (Ga2O3) and diamond, the resulting residual stress brings high defect densities and susceptibility to cracking on the Ga2O3 epilayer. To balance the stress-strain behavior and eliminate the dislocation defects, this study employed diamond composite substrates which consist of a pre-grown AlN strain interlayer on the surface of the bulk diamond to heteroepitaxy Ga2O3 nanomembranes via pulsed laser deposition (PLD). To achieve an optimal solution of high-quality Ga2O3 thin films, several comparative investigations were proposed and gave a preliminary exploration. Subsequently, spectroscopic ellipsometry (SE), high-resolution X-ray diffraction (HRXRD), atomic force microscopy (AFM), and X-ray photoelectron spectroscopy (XPS), were performed to characterize the physical, chemical, and optical properties. A comprehensive analysis was conducted on the quality of Ga2O3 thin films dependent on the growth processes including oxygen pressure, in-situ annealing treatment, and the “two-step” growth. It demonstrated that high oxygen pressure significantly increased the growth rate of Ga2O3 (∼ 2 times), slightly improved crystallinity and surface morphology (RMS decreased ∼ 2.2 nm), and reduced oxygen vacancy defects (∼ 3%). The additional in-situ annealing process and the “two-step” growth method also brought a bit of thickness increase (∼ 28 nm and ∼ 14 nm, respectively). By in-situ annealing in various stages, 2D and 3D growth modes competition caused Ga2O3 thin films' continuous grain growth and fewer oxygen vacancy defects but presented different variations of surface morphology. On the whole, the “two-step” growth enhancement scheme proves the largest effect on Ga2O3's quality among the designed sets of experiments. Exploring various optimization schemes and proposing a highly reliable growth technology route is of great significance to give impetus to Ga2O3 application in the electric power field. Consequently, for further insight, continuous work will be propelled in the future.

Improvement in the Electrical Properties of Diamond Films for Radiation Dosimeter

Purity and Orientation of the Diamond Films on the Performance of the Radiation Dosimeter

Infrared Optical Properties of Diamond Films and Electrical Properties of CVD Diamond Detectors

Heavily boron-doped polycrystalline diamond films: Microstructure, chemical composition investigation and plasma in-situ diagnostics

Structural and optical characterizations of nanostructured diamond films grown on Si(001) substrates

Reducing Energy Dissipation and Surface Effect of Diamond Nanoelectromechanical Resonators by Annealing in Oxygen Ambient

Recent progress in diamond radiation detectors

A review of diamond dosimeters in advanced radiotherapy techniques

Fabrication and Performances of Different Nano-Electrode Materials on Diamond Thin Film

Quality assessment of in situ plasma etched diamond surfaces for CVD overgrowth

Performance Improvement of Amorphous Ga2O3/P-Si Deep Ultraviolet Photodetector by Oxygen Plasma Treatment

In-situ Reflectivity Measurement in the Fabrication of Diamond X-ray Windows

Diamond energy-dispersive dosimeter for measuring linear energy deposition distributions in clinical carbon beam therapy

Optimization of Heteroepitaxial Gallium Oxide Thin Films on Diamond Composite Substrates using Pulsed Laser Deposition Method

The effect of surface treatment on the electrical properties of metal contacts to boron-doped homoepitaxial diamond film

Fabrication and applications of the optical diamond-like carbon films: a review

Superior tolerance of nanocrystalline diamond films to Heavy-ion Irradiation: Maintenance of solid lubrication properties

Primary irradiation damages and tribological property evolutions of heavy-ion radiated microcrystalline diamond films grown by MPCVD

Reaction Of Diamond Thin Films With Atomic Oxygen Simulated As Low-Earth-Orbit Environment

Effect of surface oxidation on photoluminescence of silicon vacancy color centers in the nanocrystalline diamond films

Diamond Thin Films Integrated with Flexible Substrates and Their Physical, Chemical and Biological Characteristics