Purity and Orientation of the Diamond Films on the Performance of the Radiation Dosimeter

Jin Zhang,Junguo Ran,Li Gou,Baohui Su,Xiaoming Liao,Bing Wang
DOI: https://doi.org/10.3321/j.issn:1002-185X.2005.z2.036
2005-01-01
Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering
Abstract:The aim of this study was to develop a radiation dosimeter based on diamond films with high quality [100] and [111] oriented films. The films were deposited on Si substrate using MPCVD set-up. In addition, the morphologies, purity and orientation of the diamond films as well as the dosimeter's response to X-ray were studied. The results show that the resistivity of the films is closely related to purity compared with orientation. The resistivity can be improved by decreasing the content of graphite and C-H bond. The study also proves that the dosimeter based on high purity and high [100] oriented diamond films can have high sensitivity to X-ray.
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